Vibration device, article conveyance device, and article sorting device

ABSTRACT

A vibration device includes a base, a movable bench elastically supported with respect to the base, a first horizontal excitation unit that vibrates the movable bench in a first horizontal direction, a second horizontal excitation unit that vibrates the movable bench in a second horizontal direction that crosses the first horizontal direction, a vertical excitation unit that vibrates the movable bench in a vertical direction, and first and second middle benches between the base and the movable bench, wherein first to third plate-like spring members elastically connect the base, the first and second middle benches, and the movable bench sequentially in the first horizontal direction, the second horizontal direction, and the vertical direction.

TECHNICAL FIELD

The present invention relates to an article conveyance device thatconveys an article on a movable bench by vibration of the movable bench,an article sorting device that sorts a plurality of articles on themovable bench, and a vibration device applicable to the articleconveyance device and the article sorting device.

BACKGROUND ART

Conventionally, as an article conveyance device that can convey anarticle and can arbitrarily change a conveyance direction on aconveyance line of the article, a various types of devices are known.

For example, as Patent Literature 1, there is a type of articleconveyance device in which a large number of electrostatic actuators aredisposed in a lattice shape on a conveyance surface of an article. Inthis device, the article is moved on a carrier, by providing a largenumber of square-shaped stators on the conveyance surface, andsuspending the carrier therein via a spring member in advance, and byoperating an attraction electrode provided at a bottom surface and alateral face within the stator and thereby controlling operation of thecarrier.

Also, Patent Literature 2 discloses a technique, in which a large numberof small rollers are disposed on the conveyance surface of an articlesuch that a rotation axis becomes parallel to the conveyance surface,and the rotation and direction of the rollers are controlled, therebythe conveyance direction of the article to be loaded on the rollers iscontrolled.

Also, Patent Literature 3 discloses a technique of controlling theconveyance direction of an article by alternately disposing rollershaving rotation axes orthogonal to each other on the conveyance surfaceand by controlling the rotation of the rollers.

The article conveyance devices according to the conventionaltechnologies of the Patent Literatures 1 to 3 are configured from alarge number of equipments such as the electrostatic actuator and thesmall roller, and need to drive the equipments simultaneously, therebythe configuration becomes complex and a control scheme become alsocomplex. Therefore, manufacturing costs and maintenance expenses becomehigher, and furthermore problems with the equipment are also easilycaused. Also, in such configurations, since concavities and convexitiesare caused at the conveyance surface with which the article comes intocontact, it becomes difficult to convey the article as the articlebecomes smaller with respect to the concavities and convexities. Thus,it is difficult to enable conveyance of articles having varying sizesfrom small to large by using a single article conveyance device.

As a device in which such problems do not happen, there is alsosuggested an article conveyance device that conveys the article byimparting vibration to the movable bench having the conveyance surfacefor loading the article.

For example, Patent Literature 4 discloses a technique of differing theconveyance direction by imparting vibrations having the same frequencyin the vertical and horizontal directions with respect to a movable body(movable bench) that has a trajectory for the article conveyance tocause elliptical vibrations, and by setting a phase difference of thevibrations in each direction in accordance with the coefficient offriction. In this article conveyance device, since the conveyancesurface on the movable bench can be configured as a plane, articles witha wide variety of shapes and sizes can be conveyed. Also, this articleconveyance device has many advantages in terms of downsizing and themanufacturing cost, because both of a vibration device that is amechanical device part, and a control system for controlling thevibration of this vibration device can be easily configured.

In addition, this article conveyance device can also be used as anarticle sorting device for sorting a plurality of types of articleshaving different coefficients of friction by differing only the controlsystem, because the article conveyance device can control the conveyancedirection in accordance with the coefficient of friction of the article.Similarly to the article conveyance device, this case also has manyadvantages in terms of the downsizing and the manufacturing cost becausethe simple configuration can be provided.

In the present invention, the above-described article conveyance deviceand article sorting device are referred together to as an article movingdevice which includes a device having a function of either conveying orsorting an article or a device having both functions. Also, in thepresent specification, a mechanical device part capable of being usedcommonly to these devices is referred to as a vibration device.

CITATION LIST Patent Literature

-   [PTL 1] Japanese Unexamined Patent Application Publication No.    H08-116683-   [PTL 2] Japanese Unexamined Patent Application Publication No.    2004-75387-   [PTL 3] Japanese Unexamined Patent Application Publication No.    2008-168956-   [PTL 4] Japanese Unexamined Patent Application Publication No.    2005-255351

SUMMARY OF INVENTION Technical Problem

However, the above-described vibration device causes the ellipticalvibration to the movable bench having the conveyance surface bydiffering the phase difference between vibrations in two directions, andperforms the conveyance or sorting of articles by utilizing theelliptical vibration, and the direction of the caused ellipticalvibration is limited, resulting in that flexibility of directions towhich the articles are made to be moved is low.

Thus, increasing the flexibility of movement directions of articles canbe thought by further developing the vibration device described in thePatent Literature 4 so as to configure the device such that the movablebench having the conveyance surface can be vibrated not only in twodirections, but also vibrated three-dimensionally and independently inthree directions that are different from each other.

However, in order to enable the movable bench to be vibratedindependently in the three directions, since a means that elasticallysupports the movable bench with respect to the three directionsrespectively, and a means for imparting the vibrations are needed, theconfiguration is complicated. Also, since there is a need to incorporatethe above-described means under the movable bench, the height up to theconveyance surface is increased and the barycentric position tends to behigh, and pitching and rolling of the movable bench are easily causedand therefore it can be thought that controls for moving the articlesbecome difficult.

In addition, when using the vibration device according to theabove-described Patent Literature 4, so as not to propagate thisvibration to an installation surface, generally, a vibration isolationspring is provided at an under surface of a base and overall vibrationdevice is put into a state of being elastically supported with respectto the installation surface. Thus, the transmission of vibrations to thesurrounding devices and the generation of noise are suppressed, and thesurrounding environment can be maintained properly.

However, in such a configuration, when the excitation force is allowedto act on the movable bench, the rotation moment is generated betweenthe base and the movable bench, and the attitude of the base supportedvia the vibration isolation spring becomes an unstable state. Therefore,vibrations of the movable bench elastically supported with respect to afixed bench become also unstable, and it can also be thought thatdesired vibrations cannot be caused to the movable bench.

In order to resolve the above problems, it is an object of the firstinvention in the present application to provide a vibration devicecapable of elastically supporting the movable bench effectively with asimple configuration, capable of reducing the height up to theconveyance surface, and capable of suppressing the pitching and rolling,and an article conveyance device and an article sorting device as anarticle moving device having excellent controllability and using thevibration device.

In addition, it is an object of the second invention in the presentapplication to provide a vibration device capable of causing more stablevibrations to the movable bench by stabilizing the attitude of the basewhen the excitation force is allowed to act on the movable bench, with asimple configuration, and an article conveyance device and an articlesorting device as an article moving device having excellentcontrollability and using this vibration device.

Solution to Problem

The present invention adopts the following means in order to achievethis object.

That is, a vibration device of the first invention is a vibration devicecomprising a base, a movable bench elastically supported with respect tothe base, a first horizontal excitation means that vibrates the movablebench in a first horizontal direction, a second horizontal excitationmeans that vibrates the movable bench in a second horizontal directionthat crosses the first horizontal direction, and a vertical excitationmeans that vibrates the movable bench in a vertical direction, thevibration device comprising: a first middle bench and a second middlebench between the base and the movable bench, and the vibration deviceincluding: a first horizontal elastic support means, a second horizontalelastic support means, and a vertical elastic support means thatelastically connect the base, the first middle bench, the second middlebench, and the movable bench sequentially in the first horizontaldirection, the second horizontal direction, and the vertical direction,wherein the first horizontal elastic support means is configured from afirst plate-like spring member with a thickness direction approximatelymatching to the first horizontal direction and with a longitudinaldirection arranged in a horizontal direction, the second horizontalelastic support means is configured from a second plate-like springmember with a thickness direction approximately matching to the secondhorizontal direction and with a longitudinal direction arranged in ahorizontal direction, and the vertical elastic support means isconfigured from a third plate-like spring member with a thicknessdirection approximately matching to the vertical direction and with alongitudinal direction arranged in a horizontal direction.

With this configuration, the movable bench can be elastically supportedin three directions by the plate-like spring members providedrespectively in the three directions, and the plate-like spring memberscan control the vibrations independently without having an impact oneach other because of having large rigidity in directions other than theplate thickness direction in which these members elastically supportrespectively. In addition, since these plate-like spring members arearranged in a direction where the longitudinal direction is horizontal,the height from the base to the movable bench can be suppressed, and therolling and pitching of the movable bench can be suppressed.

Also, in order not to cause deformation in a twisted mode of eachplate-like spring member while regulating translational movement in thethree directions as described above, it is favorably configured suchthat a vibration device comprises a base, a movable bench elasticallysupported with respect to the base, a first horizontal excitation meansthat vibrates the movable bench in a first horizontal direction, asecond horizontal excitation means that vibrates the movable bench in asecond horizontal direction that crosses the first horizontal direction,and a vertical excitation means that vibrates the movable bench in avertical direction, the vibration device comprises a first middle benchand a second middle bench between the base and the movable bench, thevibration device includes a first horizontal elastic support means, asecond horizontal elastic support means, and a vertical elastic supportmeans that elastically connect the base, the first middle bench, thesecond middle bench, and the movable bench sequentially in the firsthorizontal direction, the second horizontal direction, and the verticaldirection, the first horizontal elastic support means is configured froma first plate-like spring member with a thickness directionapproximately matching to the first horizontal direction and with alongitudinal direction arranged in a horizontal direction, the secondhorizontal elastic support means is configured from a second plate-likespring member with a thickness direction approximately matching to thesecond horizontal direction and with a longitudinal direction arrangedin a horizontal direction, the vertical elastic support means isconfigured from a third plate-like spring member with a thicknessdirection approximately matching to the vertical direction and with alongitudinal direction arranged in a horizontal direction, and at leastany of the first to third plate-like spring members are provided inparallel in plural while being separated at a predetermined distance.

Also, in order to further simplify and render compact the configuration,it is effective that the elastic support means and the excitation meansare integrated, and thereby, it is favorably configured such that avibration device comprises a base, a movable bench elastically supportedwith respect to the base, a first horizontal excitation means thatvibrates the movable bench in a first horizontal direction, a secondhorizontal excitation means that vibrates the movable bench in a secondhorizontal direction that crosses the first horizontal direction, and avertical excitation means that vibrates the movable bench in a verticaldirection, the vibration device comprises a first middle bench and asecond middle bench between the base and the movable bench, thevibration device includes a first horizontal elastic support means, asecond horizontal elastic support means, and a vertical elastic supportmeans that elastically connect the base, the first middle bench, thesecond middle bench, and the movable bench sequentially in the firsthorizontal direction, the second horizontal direction, and the verticaldirection, the first horizontal elastic support means is configured froma first plate-like spring member with a thickness directionapproximately matching to the first horizontal direction and with alongitudinal direction arranged in a horizontal direction, the secondhorizontal elastic support means is configured from a second plate-likespring member with a thickness direction approximately matching to thesecond horizontal direction and with a longitudinal direction arrangedin a horizontal direction, the vertical elastic support means isconfigured from a third plate-like spring member with a thicknessdirection approximately matching to the vertical direction and with alongitudinal direction arranged in a horizontal direction, the first andsecond horizontal excitation means and the vertical excitation means arepiezoelectric elements that are stuck on at least one face of the firstto third plate-like spring members, and the first to third plate-likespring members are vibrated by applying sinusoidal voltage to thesepiezoelectric elements to cause periodic elongation.

In addition, in order not to cause the deformation in the twisted modeof each plate-like spring member while regulating translationalmovement, in the three directions, of the movable bench and in order tofurther simplify and render compact the configuration by integrating theelastic support means and the excitation means, it is favorablyconfigured such that a vibration device comprises a base, a movablebench elastically supported with respect to the base, a first horizontalexcitation means that vibrates the movable bench in a first horizontaldirection, a second horizontal excitation means that vibrates themovable bench in a second horizontal direction that crosses the firsthorizontal direction, and a vertical excitation means that vibrates themovable bench in a vertical direction, the vibration device comprises afirst middle bench and a second middle bench between the base and themovable bench, the vibration device includes a first horizontal elasticsupport means, a second horizontal elastic support means, and a verticalelastic support means that elastically connect the base, the firstmiddle bench, the second middle bench, and the movable benchsequentially in the first horizontal direction, the second horizontaldirection, and the vertical direction, the first horizontal elasticsupport means is configured from a first plate-like spring member with athickness direction approximately matching to the first horizontaldirection and with a longitudinal direction arranged in a horizontaldirection, the second horizontal elastic support means is configuredfrom a second plate-like spring member with a thickness directionapproximately matching to the second horizontal direction and with alongitudinal direction arranged in a horizontal direction, the verticalelastic support means is configured from a third plate-like springmember with a thickness direction approximately matching to the verticaldirection and with a longitudinal direction arranged in a horizontaldirection, at least any of the first to third plate-like spring membersare provided in parallel in plural while being separated at apredetermined distance, in addition, the first and second horizontalexcitation means and the vertical excitation means are piezoelectricelements that are stuck on at least one face of the first to thirdplate-like spring members, and the first to third plate-like springmembers are vibrated by applying sinusoidal voltage to thesepiezoelectric elements to cause periodic elongation.

Also, in order to be able to easily perform adjustments by which naturalfrequency with respect to each direction is made to be separated orclosed, it is preferable that the effective length of each plate-likespring member is made to be changeable, and for achieving this, it isfavorable that spring seats are provided between at least any of thebase and the first middle bench and the first plate-like spring member,and between at least any of the first middle bench and the second middlebench and the second plate-like spring member, respectively, andpositions of the spring seats are configured to be changeable withrespect to the longitudinal directions of the first and secondplate-like spring members, respectively.

Also, the vibration device of the second invention is a vibration devicecomprising a base supported on a ground surface via a vibrationisolation spring, a movable bench elastically supported with respect tothe base, a first horizontal excitation means that vibrates the movablebench in a first horizontal direction, a second horizontal excitationmeans that vibrates the movable bench in a second horizontal directionthat crosses the first horizontal direction, and a vertical excitationmeans that vibrates the movable bench in a vertical direction, whereinthe vibration device comprises a first middle bench and a second middlebench between the base and the movable bench, the vibration deviceincludes a plurality of first horizontal elastic support means, aplurality of second horizontal elastic support means, and a plurality ofvertical elastic support means that elastically connect the base, thefirst middle bench, the second middle bench, and the movable benchsequentially in the first horizontal direction, the second horizontaldirection, and the vertical direction, and the vibration device ischaracterized to be configured such that if overall device is supposedas the a first mass body, a second mass body, and a third mass body withthe first horizontal elastic support means and the second horizontalelastic support means as boundaries, respective barycentric positions ofthese mass bodies are almost the same in the vertical direction andhorizontal direction.

With this configuration, three-dimensional vibration can be caused tothe movable bench by elastically supporting the movable bench in threedirections of two horizontal directions and the vertical direction andexciting vibrations in each direction, the rotation moment that occursin association with excitation of vibrations in the horizontal directioncan be suppressed to stabilize the attitude of the base, and vibrationscan be correctly caused to the movable bench. In addition, propagationof vibrations with respect to the installation surface can besuppressed, and generation of noise and vibration can be prevented andthe work environment can be improved.

In addition, while being based on this configuration, in order to beable to further stabilize the attitude of members to be attached via thehorizontal elastic support means and to cause vibrations, it isfavorably configured such that a vibration device comprises a basesupported on a ground surface via a vibration isolation spring, amovable bench elastically supported with respect to the base, a firsthorizontal excitation means that vibrates the movable bench in a firsthorizontal direction, a second horizontal excitation means that vibratesthe movable bench in a second horizontal direction that crosses thefirst horizontal direction, and a vertical excitation means thatvibrates the movable bench in a vertical direction, the vibration devicecomprises a first middle bench and a second middle bench between thebase and the movable bench, the vibration device includes a plurality offirst horizontal elastic support means, a plurality of second horizontalelastic support means, and a plurality of vertical elastic support meansthat elastically connect the base, the first middle bench, the secondmiddle bench, and the movable bench sequentially in the first horizontaldirection, the second horizontal direction, and the vertical direction,and if overall device is supposed as a first mass body, a second massbody and a third mass body with the first horizontal elastic supportmeans and the second horizontal elastic support means as boundaries,respective barycentric positions of these mass bodies are almost thesame in the vertical direction and horizontal direction, and thebarycentric position of each mass body and an attachment position ofeach horizontal elastic support means are almost the same in thevertical direction.

Also, in order to prevent occurrence of unexpected vibrations, such asswivel movement of the movable bench supported by the vertical elasticsupport means, it is favorably configured such that a vibration devicecomprises a base supported on a ground surface via a vibration isolationspring, a movable bench elastically supported with respect to the base,a first horizontal excitation means that vibrates the movable bench in afirst horizontal direction, a second horizontal excitation means thatvibrates the movable bench in a second horizontal direction that crossesthe first horizontal direction, and a vertical excitation means thatvibrates the movable bench in a vertical direction, the vibration devicecomprises a first middle bench and a second middle bench between thebase and the movable bench, the vibration device includes a plurality offirst horizontal elastic support means, a plurality of second horizontalelastic support means, and a plurality of vertical elastic support meansthat elastically connect the base, the first middle bench, the secondmiddle bench, and the movable bench sequentially in the first horizontaldirection, the second horizontal direction, and the vertical direction,and if overall device is supposed as a first mass body, a second massbody, and a third mass body with the first horizontal elastic supportmeans and the second horizontal elastic support means as boundaries,respective barycentric positions of these mass bodies are configured tobe almost the same in the vertical direction and horizontal direction,and in addition, the plurality of vertical elastic support means areprovided so as to be symmetrical with respect to each excitationdirection with the barycentric position of the each mass body as acenter, and a counter weight with respect to the movable bench isprovided at a position which are symmetrical with sandwiching thevertical elastic support means.

In addition, in order to stabilize the attitude of members to beattached via the horizontal elastic support means, and simultaneously tosuppress swivel movement of the movable bench supported by the verticalelastic support means, it is favorably configured such that a vibrationdevice comprises a base supported on a ground surface via a vibrationisolation spring, a movable bench elastically supported with respect tothe base, a first horizontal excitation means that vibrates the movablebench in a first horizontal direction, a second horizontal excitationmeans that vibrates the movable bench in a second horizontal directionthat crosses the first horizontal direction, and a vertical excitationmeans that vibrates the movable bench in a vertical direction, thevibration device comprises a first middle bench and a second middlebench between the base and the movable bench, the vibration deviceincludes a plurality of first horizontal elastic support means, aplurality of second horizontal elastic support means, and a plurality ofvertical elastic support means that elastically connect the base, thefirst middle bench, the second middle bench, and the movable benchsequentially in the first horizontal direction, the second horizontaldirection, and the vertical direction, and if overall device is supposedas a first mass body, a second mass body, and a third mass body with thefirst horizontal elastic support means and the second horizontal elasticsupport means as boundaries, respective barycentric positions of thesemass bodies are almost the same in the vertical direction and horizontaldirection, the barycentric position of each mass body and an attachmentposition of each horizontal elastic support means are configured to bealmost the same in the vertical direction, in addition, the plurality ofvertical elastic support means are provided so as to be symmetrical withrespect to each excitation direction with the barycentric position ofeach mass body as a center, and a counter weight with respect to themovable bench is provided at a position which are symmetrical withsandwiching these vertical elastic support means.

Also, as the other configuration of this second invention, a vibrationdevice comprising a base supported on a ground surface via a vibrationisolation spring, a movable bench elastically supported with respect tothe base, a horizontal excitation means that vibrates the movable benchin a horizontal direction, and a vertical excitation means that vibratesthe movable bench in a vertical direction, the vibration devicecomprising a middle bench between the base and the movable bench, thevibration device including a plurality of horizontal elastic supportmeans and a plurality of vertical elastic support means that elasticallyconnect the base, the middle bench, and the movable bench sequentiallyin the horizontal direction and vertical direction, and the vibrationdevice being configured such that if overall device is supposed as twomass bodies with the horizontal elastic support means as a boundary,respective barycentric positions of these mass bodies are almost thesame in the vertical direction and horizontal direction, can be given.

Also configured in this way, the barycentric positions of mass bodieswhich are connected via the horizontal elastic support means, andrelatively move in the horizontal direction are almost the same in thevertical direction, and thereby, it is possible to suppress the rotationmoment which incidentally occurs by excitation force in the horizontaldirection to stabilize the attitude of the base, and to correctly causevibrations to the movable bench. Also, propagation of vibrations withrespect to the installation surface can be suppressed, and generation ofnoise and vibration can be prevented and the work environment can beimproved.

In addition, while being based on this configuration, in order to beable to cause vibrations with further stabilizing the attitude ofmembers to be attached via the horizontal elastic support means, it isfavorably configured such that a vibration device comprises a basesupported on a ground surface via a vibration isolation spring, amovable bench elastically supported with respect to the base, ahorizontal excitation means that vibrates the movable bench in ahorizontal direction, and a vertical excitation means that vibrates themovable bench in a vertical direction, the vibration device comprises amiddle bench between the base and the movable bench, the vibrationdevice includes a plurality of horizontal elastic support means and aplurality of vertical elastic support means that elastically connect thebase, the middle bench, and the movable bench sequentially in thehorizontal direction and vertical direction, and if overall device issupposed as two mass bodies with the horizontal elastic support means asa boundary, respective barycentric positions of these mass bodies arealmost the same in the vertical direction and horizontal direction, andthe barycentric position of each mass body and an attachment position ofeach horizontal elastic support means are almost the same in thevertical direction.

Also, in order not to occur unexpected vibrations, such as swivelmovement of the movable bench supported by the vertical elastic supportmeans, it is favorably configured such that a vibration device comprisesa base supported on a ground surface via a vibration isolation spring, amovable bench elastically supported with respect to the base, ahorizontal excitation means that vibrates the movable bench in ahorizontal direction, and a vertical excitation means that vibrates themovable bench in a vertical direction, the vibration device comprises amiddle bench between the base and the movable bench, the vibrationdevice includes a plurality of horizontal elastic support means and aplurality of vertical elastic support means that elastically connect thebase, the middle bench, and the movable bench sequentially in thehorizontal direction and vertical direction, and if overall device issupposed as two mass bodies with the horizontal elastic support means asa boundary, respective barycentric positions of these mass bodies areconfigured to be almost the same in the vertical direction andhorizontal direction, in addition, the plurality of vertical elasticsupport means are provided so as to be symmetrical with respect to eachexcitation direction with the barycentric position of each mass body asa center, and a counter weight with respect to the movable bench isprovided at a position which is symmetrical with sandwiching thesevertical elastic support means.

In addition, in order to stabilize the attitude of members to beattached via the horizontal elastic support means, and simultaneously tosuppress swivel movement of the movable bench supported by the verticalelastic support means, it is favorably configured such that a vibrationdevice comprises a base supported on a ground surface via a vibrationisolation spring, a movable bench elastically supported with respect tothe base, a horizontal excitation means that vibrates the movable benchin a horizontal direction, and a vertical excitation means that vibratesthe movable bench in a vertical direction, the vibration devicecomprises a middle bench between the base and the movable bench, thevibration device includes a plurality of horizontal elastic supportmeans and a plurality of vertical elastic support means that elasticallyconnect the base, the middle bench, and the movable bench sequentiallyin the horizontal direction and vertical direction, and if overalldevice is supposed as two mass bodies with the horizontal elasticsupport means as a boundary, respective barycentric positions of thesemass bodies are almost the same in the vertical direction and horizontaldirection, and the barycentric position of each mass body and anattachment position of each horizontal elastic support means areconfigured to be almost the same in the vertical direction, in addition,the plurality of vertical elastic support means are provided so as to besymmetrical with respect to each excitation direction with thebarycentric position of each mass body as a center, and a counter weightwith respect to the movable bench is provided at a position which issymmetrical with sandwiching the vertical elastic support means.

Also, when being on the basis of any configuration of theabove-described second invention, in order to make the barycentricposition of the base higher and to easily match the barycentric positionto the other members to be provided on the base, and in order to be ableto protect drive devices, such as the excitation means, it is favorablethat a peripheral wall part raised from near an outer peripheral edge ofthe base is provided, and the peripheral wall part is configured tosurround the elastic support means and the excitation means, and isconfigured as a barycentric adjustment member that adjusts thebarycentric position of the base.

In order to be configured as an article conveyance device havingexcellent controllability and being capable of conveying articles on amovable bench in any direction, it is favorably configured such that anarticle conveyance device that conveys articles loaded on the movablebench by vibrations of the movable bench comprises either of theabove-described vibration devices, a vibration control means thatcontrols each excitation means so as to simultaneously generate periodicexcitation forces by a plurality of the excitation means which thevibration device has, with a phase difference and at the same frequency,to cause three-dimensional vibration trajectory to the movable bench,and a vibration switching means that switches the amplitude and thephase difference of the periodic excitation forces by the eachexcitation means.

Also, in order to be configured as an article sorting device havingexcellent controllability and being capable of sorting a plurality ofarticles on a movable bench in accordance with the coefficients offriction, it is favorably configured such that an article sorting devicethat sorts a plurality of articles loaded on a movable bench byvibrations of the movable bench comprises either of the above-describedvibration devices, and a vibration control means that controls eachexcitation means so as to simultaneously generate periodic excitationforces by a plurality of the excitation means which the vibration devicehas, with a phase difference and at the same frequency, to causethree-dimensional vibration trajectory to the movable bench, and theplurality of articles loaded on the movable bench are simultaneouslysorted by setting a phase difference between periodic excitation forceby the horizontal excitation means and periodic excitation force by thevertical excitation means, so as to move each article in a differentdirection on the basis on the magnitude, with respect to a referencecoefficient of friction, of coefficient of friction which individualarticle has, with the predetermined reference coefficient of friction asa boundary.

Effects of Invention

According to the above-explained first invention, it is possible toprovide a vibration device capable of effectively and elasticallysupporting a movable bench in three directions independently whilehaving a simple configuration, and of reducing the height up to theconveyance surface and of suppressing the pitching and rolling of themovable bench, and an article conveyance device and an article sortingdevice having excellent controllability and using this vibration device.Also, according to the second invention, it is possible to provide avibration device capable of stabilizing the attitude of a base even in aform in which the base is supported via a vibration isolation springbecause the rotation moment that occurs at the time when an excitationforce is allowed to act on a movable bench can be suppressed moreeffectively, capable of further stabilizing vibrations of the movablebench to be supported by the base to improve operation accuracy, andcapable of suppressing propagation of vibrations to the installationsurface to prevent noise and vibration, for example, to improve the workenvironment, and an article conveyance device and an article sortingdevice having excellent controllability and using this vibration device.

BRIEF DESCRIPTION OF DRAWINGS

[FIG. 1] FIG. 1 is a system configuration diagram of a vibration deviceaccording to a first embodiment of the present invention and an articleconveyance device using the vibration device.

[FIG. 2] FIG. 2 is a perspective view of the vibration device.

[FIG. 3] FIG. 3 is an exploded perspective view of the vibration device.

[FIG. 4] FIG. 4 is a perspective view illustrating a main part of thevibration device.

[FIG. 5] FIG. 5 is a plan view illustrating a main part of the vibrationdevice.

[FIG. 6] FIG. 6 is a front view illustrating a main part of thevibration device.

[FIG. 7] FIG. 7 is a plan view illustrating when a movable bench in thevibration device is moved in a first horizontal direction.

[FIG. 8] FIG. 8 is a plan view illustrating when the movable bench inthe vibration device is moved in a second horizontal direction.

[FIG. 9] FIG. 9 is a front view illustrating when the movable bench inthe vibration device is moved in a vertical direction.

[FIG. 10] FIG. 10 is a conceptual diagram illustrating an excitationdirection of the vibration device.

[FIG. 11] FIG. 11 is a diagram illustrating a relationship between thephase difference among periodic excitation forces exerted in eachdirection in the vibration device and conveyance speed of the articles.

[FIG. 12] FIG. 12 is a diagram illustrating a relationship among thephase difference among periodic excitation forces exerted in eachdirection in the vibration device, the conveyance speed of articles, andthe coefficient of friction thereof.

[FIG. 13] FIG. 13 is a diagram illustrating a relationship between theamplitude of the periodic excitation forces exerted in a horizontaldirection in the same vibration device and the conveyance speed of thearticles.

[FIG. 14] FIGS. 14 (a) through (f) each show a plan view exemplifying aconveyance trajectory for a case that the articles are conveyed usingthe vibration device.

[FIG. 15] FIG. 15 is a system configuration diagram of a vibrationdevice according to a second embodiment of the present invention and anarticle sorting device using the vibration device.

[FIG.16] FIG. 16 is a diagram illustrating a relationship between thephase difference among periodic excitation forces exerted in eachdirection in the vibration device and the movement speed of thearticles.

FIG. 17 is a plan view illustrating movement regions when a plurality ofarticles having different coefficients of friction are moved by usingthe vibration device.

[FIG. 18] FIGS. 18 (a) through (d) are explanatory diagrams illustratingrespective movement regions of the plurality of articles havingdifferent coefficients of friction, when the phase difference in the Xand Y directions is changed by using the vibration device.

[FIG. 19] FIGS. 19 (a) through (d) are explanatory diagrams illustratingrespective movement regions of the plurality of articles havingdifferent coefficients of friction, when the phase difference in the Xand Y directions is changed by using the vibration device.

[FIG. 20] FIGS. 20 (a) and (b) each is a plan view illustrating movementdirections of the articles at the time of conditions illustrated inFIGS. 18(a) and 18(b).

[FIG. 21] FIG. 21 is a perspective view illustrating a vibration deviceaccording to a third embodiment of the present invention.

[FIG. 22] FIG. 22 is a system configuration diagram of a vibrationdevice according to a fourth embodiment of the present invention and anarticle conveyance device using the vibration device.

[FIG. 23] FIG. 23 is a perspective view of the vibration device.

[FIG. 24] FIG. 24 is a plan view of the vibration device.

[FIG. 25] FIG. 25 is a perspective view in a state where a part of thevibration device is removed.

[FIG. 26] FIG. 26 is a perspective view illustrating a main part of thevibration device.

[FIG. 27] FIG. 27 is a plan view illustrating a main part of thevibration device.

[FIG. 28] FIG. 28 is a cross-sectional arrow view taken along line A-Ain FIG. 24.

[FIG. 29] FIG. 29 is a cross-sectional arrow view taken along line B-Bin FIG. 24.

[FIG. 30] FIG. 30 is a system configuration diagram of a vibrationdevice according to a fifth embodiment of the present invention and anarticle sorting device using the vibration device.

[FIG. 31] FIG. 31 is a perspective view of a vibration device accordingto a sixth embodiment of the present invention.

[FIG. 32] FIG. 32 is a perspective view in a state where a part of thevibration device is removed.

[FIG. 33] FIG. 33 is a plan view of the vibration device.

[FIG. 34] FIG. 34 is a cross-sectional arrow view taken along line A-Ain FIG. 33.

[FIG. 35] FIG. 35 is a perspective view of a vibration device accordingto a seventh embodiment of the present invention.

[FIG. 36] FIG. 36 is a perspective view in a state where a part of thevibration device is removed.

[FIG. 37] FIG. 37 is a plan view of the vibration device.

[FIG. 38] FIG. 38 is a cross-sectional arrow view taken along line A-Ain FIG. 37.

DESCRIPTION OF EMBODIMENTS

Embodiments of the present invention will be explained below withreference to the drawings.

<First Embodiment>

In FIG. 1, a form in which a vibration device 2 according to a firstembodiment of the present invention and in addition a control systemunit 3 for controlling the vibration device 2 are configured as anarticle conveyance device 1 that is one of article moving devices, isillustrated.

The control system unit 3 is configured such that, by performing controlof piezoelectric elements 81, 82, and 83 incorporated in the vibrationdevice 2 as described later, periodic excitation forces in eachdirection, that is, in X as a first horizontal direction, Y as a secondhorizontal direction, and Z as a vertical direction are imparted to thevibration device 2 to cause vibrations.

Note that, each direction of the X, Y, and Z is defined as indicated inthe coordinate axis illustrated in the drawings, and also in thefollowing the explanation will be advanced along the coordinate axisillustrated in the drawings as appropriate.

FIG. 2 illustrates the above-described vibration device 2 as a statewhere the device is actually used. In this state, four faces of thefront face, the back face, and the lateral faces are covered with acover 42 installed on a base 4. Also, at a top face a rectangular-shapedconveyance bench 63 that configures a part of a movable bench 6 isprovided, and a top face 63 a of the conveyance bench 63 is made as aconveyance surface such that an article 9 to be conveyed can be loaded.

In FIG. 3, a state where the conveyance bench 63 is removed from theabove-described vibration device 2 is illustrated. The vibration device2 has a movable seat 61 as a rectangular parallelepiped-like blockelastically supported with respect to the three axis directions of theX, Y, and Z inside of that device, and a rectangular plate-like movableplate 62 is connected with respect to the movable seat 61 by fourcounter sunk screws 62 a to 62 a (only two screws are described in thedrawing). Then, the above-described conveyance bench 63 is provided at atop face of the movable plate 62, and the movable plate 62 and theconveyance bench 63 are fastened using screw holes 62 b to 62 b andscrews 63 b to 63 b provided near four corners.

The movable seat 61, the movable plate 62, and the conveyance bench 63are integrated as the movable bench 6 and elastically supported insideof the vibration device 2, and vibrations are imparted to the movablebench 6 by an excitation means which is described later.

A state where the above-described cover 42, movable plate 62, andconveyance bench 63 are removed is illustrated in FIG. 4. Hereinafter,configurations of the vibration device 2 according to the presentembodiment will be explained in detail by using this figure.

The vibration device 2 is configured to elastically support the movableseat 61 in three directions of the X, Y, and Z with respect to the base4, and first plate-like spring members 71 and 71 as a first horizontalelastic support means, second plate-like spring members 72 and 72 as asecond horizontal elastic support means, and third plate-like springmembers 73 and 73 as a vertical elastic support means are provided suchthat the base 4, first middle benches 51 and 51, a second middle bench52, and the movable seat 61 as a rigid body portion are sequentiallyconnected. In each of the plate-like spring members 71 to 73, becausethe plate thickness direction is respectively disposed so as to be inthe X, Y, and Z directions, elastic deformations are easily made withrespect to the directions.

In addition, the first to third piezoelectric elements 81 to 83 as anexcitation means for vibrating the movable seat 61 in three directionsof the X, Y, and Z are included.

Hereinafter, explanations for these configurations are provided in moredetail.

First, the base 4 is configured as a rectangular-shaped plate, and boltholes for installing to an external equipment or floor face notillustrated are formed at four corners. It is favorable to attach anelastic body having a small spring constant, such as a rubber vibrationisolator, which is not illustrated in the figure, under the base 4 to beable to reduce the counterforce from the installation surface.

Then, at four places positioned slightly closer to the center than thefour corners, attachment blocks 41 are provided so as to berectangularly disposed. Although the description is omitted in thisfigure, as illustrated in FIG. 5, each attachment block 41 is configuredto be fixed with respect to the base 4 with using the screw.

Returning to FIG. 4, the attachment blocks 41 are formed as blockshaving an L-shaped cross section respectively, and are in a state whereone side that forms the letter L is abutted on the base 4, and the otherside is raised. Then, the raised side is configured to form the YZ planeorthogonal to the X direction. Then, the first plate-like spring members71 and 71 are provided to connect to the attachment blocks 41 and 41which are adjacent in pairs in the Y direction. Since the firstplate-like spring members 71 and 71 are attached in the YZ planes thatthe above-described respective attachment blocks 41 to 41 have, theplate thickness direction will be the X direction and the longitudinaldirection will be the Y direction.

Also, the first plate-like spring members 71 and 71 will be provided inparallel by two parts separated at a predetermined distance in the Xdirection, because the members 71 and 71 are provided at two pairs ofattachment blocks 41 to 41, respectively.

Also, both end parts of the first plate-like spring members 71 and 71are supported such that the deflection angle is regulated, because theboth end parts are fixed using screws not illustrated so as to besandwiched between rectangular-shaped spring retainers 71 d to 71 d andthe YZ plane which each of the above-described attachment blocks 41 to41 has.

Then, near the center, in the longitudinal direction, of the firstplate-like spring members 71 and 71, the first middle benches 51 and 51are connected via spring seats 71 c to 71 c, respectively. The firstmiddle benches 51 are formed in rectangular parallelepiped shapesextending in the Y direction, respectively.

The spring seats 71 c to 71 c are provided at the first plate-likespring members 71 and 71 by two respectively, and spring retainers 71 eto 71 e are provided so as to oppose to the respective spring seats 71 cto 71 c. The first plate-like spring members 71 and 71 are sandwiched bythe opposing spring seats 71 c to 71 c and spring retainers 71 e to 71e, and therefore the deflection angle is regulated, and the members 71and 71 are connected to the above-described first middle benches 51 and51 by screws (see FIG. 5) at these portions. Although the first middlebenches 51 and 51 are in two-divided configuration, the benches 51 and51 perform operations integrally because the benches 51 and 51 areconnected by second plate-like spring members 72 and 72 which aredescribed later.

The above-described first middle benches 51 and 51 are formed in therectangular parallelepiped shape as described above, each of six facesare disposed to be in the direction orthogonal to each plane of the X,Y, and Z axes. Then, two second plate-like spring members 72 and 72 areprovided so as to connect between XZ planes orthogonal to the Y axiswhich each has.

By attaching the members 72 and 72 in this way, the two secondplate-like spring members 72 and 72 are disposed in parallel with themembers 72 and 72 separated from each other at a predetermined distancein the Y direction while the plate thickness direction is orthogonal tothe Y axis, and the longitudinal direction is directed to the Xdirection, respectively.

The second plate-like spring members 72 and 72 are supported such thatthe deflection angle is regulated, since such that both end parts aresandwiched between rectangular-shaped spring retainers 72 d to 72 d andthe XZ planes that the above-described first middle benches 51 and 51have, the members 72 and 72 are fixed by screws (see FIG. 5) in thatportion.

Near the center, in the longitudinal direction, of the second plate-likespring members 72 and 72, the second middle bench 52 is connected viaspring seats 72 c to 72 c.

The spring seats 72 c to 72 c are provided at the second plate-likespring members 72 and 72 by two respectively, and spring retainers 72 eto 72 e are provided so as to oppose to the respective spring seats 72 cto 72 c. The second plate-like spring members 72 and 72 are sandwichedby the opposing spring seats 72 c to 72 c and spring retainers 72 e to72 e, and therefore the deflection angle is regulated, and the members72 and 72 are connected to the above-described second middle bench 52 byscrews (see FIG. 5) at these portions.

The second middle bench 52 is configured as a rectangular frame body asillustrated in the plan view of FIG. 5, and is formed by combining fourrectangular parallelepiped blocks each having six faces which areorthogonal in the X, Y, and Z directions.

In the spring seats 72 c to 72 c and the spring retainers 72 e to 72 e,as illustrated in FIG. 6, long holes are formed, and the secondplate-like spring members 72 and 72 are configured to be connected tothe second middle bench 52 by screws to be inserted in the long holes asillustrated in FIG. 5. The spring seats 72 c to 72 c and the springretainers 72 e to 72 e are configured to be able to move by that longholes in the X direction, that is, in the longitudinal direction of thesecond plate-like spring members 72 and 72, and thereby the secondplate-like spring members 72 and 72 are configured to be able to changethe effective length that acts as the springs.

Similarly, long holes are also formed in regard to the spring seats 71 cto 71 c and spring retainers 71 e to 71 e for connecting theabove-described first plate-like spring members 71 and 71 to the firstmiddle benches 51 and 51, and because the members 71 and 71 areconfigured to be able to move by that long holes in the Y direction, andthereby the effective lengths of the first plate-like spring members 71and 71 are also configured to be changeable.

As described above, the first plate-like spring members 71 and 71 andthe second plate-like spring members 72 and 72 can change the springconstant and also change the natural frequency, by changing theeffective length, respectively.

Returning to FIG. 4, a total of four third plate-like spring members 73to 73 are provided by two respectively, at a top face and an under faceof the second middle bench 52 configured as the rectangular frame body.The third plate-like spring members 73 to 73 are provided so as toconnect, in the X direction, between respective XY planes that areformed as the top face and under face of portions existing at positionsof two sides parallel to the Y direction, of sides that configure therectangle each forming the second middle bench 52. The third plate-likespring members 73 to 73 are supported such that the deflection angle isregulated, since such that both end parts are sandwiched betweenrectangular-shaped spring retainers 73 c to 73 c and the XY planes thatthe above-described second middle bench 52 has, the members 73 to 73 arefixed using screws (see FIG. 5) at this portion.

Also, near the middle parts of the third plate-like spring members 73and 73 connected to the top face of the second middle bench 52, and ofthe third plate-like spring members 73 and 73 connected to the underface of the second middle bench 52 (see FIG. 5), a spring-to-springblock 73 e is provided in the gap in order to maintain the intervalbetween both members.

In addition, below the spring-to-spring block 73 e, a spring retainer 73e is provided with sandwiching the third plate-like spring members 73and 73 connected to the under face of the second middle bench 52. Thespring retainer 73 e can perform fixing using screws, which are notillustrated, with the two third plate-like spring members 73 and 73sandwiched between the retainer and the under face of the second middlebench 52.

Also, above the spring-to-spring block 73 e, the above-described movableseat 61 is provided with sandwiching the third plate-like spring members73 and 73 connected to the top face of the second middle bench 52. Themovable seat 61 can perform fixing using screws in the form asillustrated in FIG. 5 with the two third plate-like spring members 73and 73 sandwiched between the top face of the second middle bench 52 andthe seat. Because the attachment of the movable plate 62 is performed atthe top face of the movable seat 61 as illustrated in FIG. 3,consideration is given not to project heads of the above-describedscrews.

As described above, the vibration device 2 of the present embodimentillustrated in FIG. 4 has the configuration in which the first middlebenches 51 and 51 are elastically supported in the X direction withrespect to the base 4 by using the first plate-like spring members 71and 71, the second middle bench 52 is elastically supported in the Ydirection with respect to the first middle benches 51 and 51 by usingthe second plate-like spring member 72, and the movable seat 61 iselastically supported in the Z direction with respect to the secondmiddle bench 52 by using the third plate-like spring member 73. Thereby,the movable bench 6 is configured to be elastically supported in eachdirection of the X, Y, and Z with respect to the base 4.

Respective plate-like spring members 71 to 73 have elasticity in the X,Y, and Z directions that are the plate thickness directionsrespectively, and have sufficient rigidity in the width directions andthe longitudinal directions orthogonal to the thickness directions.Therefore, the support in each direction can be considered as beingindependent.

Also, with respect to each direction, the first to third plate-likespring members 71 to 73 are provided in parallel respectively, and themembers are made to support in pairs, and thereby it is configured as ifthe members 71 to 73 configured one part of the parallel link. Withthis, respective plate-like spring members 71 to 73 are configured to beable to displace while keeping the relationship in which the clearanceis constant between the members that are in pairs, without performingthe twist movement.

In addition, the vibration device of the present embodiment has a firsthorizontal excitation means 81, a second horizontal excitation means 82,and a vertical excitation means 83 which are independent in the X, Y,and Z directions.

First, the first horizontal excitation means that is an excitation meansin the X direction is configured from a total of four firstpiezoelectric elements 81 to 81 that are stuck on surfaces of two firstplate-like spring members 71 and 71 by two respectively. The firstpiezoelectric elements 81 to 81 are allowed to cause displacements inthe X direction, by causing elongations or contractions in the Ydirection by being applied with voltage to cause bending for the firstplate-like spring members 71 and 71.

Since the first plate-like spring members 71 and 71 have bend points inthe middle, at which the bending direction changes, from a base-sideconnection point 71 a positioned by a spring retainer 71 d of an endpart, to a first middle bench-side connection point 71 b positioned bythe spring seat 71 c and a spring retainer 71 e of the middle, affixingthe first piezoelectric elements 81 to 81 up to that portions, instead,will inhibit the deformation and reduce the efficiency. Therefore, it isefficient that the first piezoelectric elements 81 to 81 are providedcloser to any end parts, but avoiding the middle of the effective lengthof spring.

The first piezoelectric elements 81 to 81 are provided at the sameposition from the end parts respectively, and are allowed to cause thesame deformations by adjusting the output. By doing in this way, asillustrated in FIG. 7, the first plate-like spring members 71 and 71 canbe deformed in the same manner while keeping the interval between themembers 71 and 71 separated in the X direction, and the first middlebenches 51 and 51 can be displaced only in the X direction while keepingthe horizontal state.

Next, returning to FIG. 4, similar to the above-described firsthorizontal excitation means, the second horizontal excitation means thatis an excitation means in the Y direction is configured from a total offour second piezoelectric elements 82 to 82 that are stuck on surfacesof the two second plate-like spring members 72 and 72 by tworespectively. The second piezoelectric elements 82 to 82 are allowed tocause displacements in the Y direction by causing elongations orcontraction in the X direction by being applied with voltage to causebending for the second plate-like spring members 72 and 72. The secondpiezoelectric elements 82 to 82 are also attached at positions similarto the first piezoelectric elements 81 to 81, and by doing in this way,as illustrated in FIG. 8, can make the second plate-like spring members72 and 72 separated in the Y direction to deform in the same mannerwhile keeping the interval between the members 72 and 72, and candisplace the second middle bench 52 only in the Y direction whilekeeping the horizontal state.

In addition, returning to FIG. 4, the vertical excitation means that isan excitation means in the Z direction is configured from a total offour third piezoelectric elements 83 to 83 that are stuck by tworespectively on surfaces of two plate-like spring members 73 and 73 ofan upper side of the plate-like spring members 73 to 73 provided up anddown by two. The third piezoelectric elements 83 to 83 are allowed tocause displacements in the Z direction by causing elongations orcontractions in the X direction by being applied with voltage to causebending for the third plate-like spring members 73 and 73. The thirdpiezoelectric elements 83 to 83 are also attached at positions similarto the first piezoelectric elements 81 to 81 and the secondpiezoelectric elements 82 to 82, and by doing in this way, asillustrated in FIG. 9, can similarly make the third plate-like springmembers 73 and 73 separated in the Z direction to deform while keepingthe interval between the members 73 and 73, and can displace the movableseat 61 only in the Z direction while keeping the horizontal state. Notethat, it is also possible to provide the third piezoelectric elements 83to 83 in the two third plate-like spring members 73 and 73 provided atthe lower side, and also in a total of four third plate-like springmembers 73 to 73 of the upper side and the lower side.

As described above, by changing the voltage that can impart thedisplacement in each direction of the X, Y, and Z in the form ofsinusoidal waves respectively, periodic excitation force can be impartedwith respect to the movable seat 61 in each direction.

In relation to the vibration device 2 that is configured as describedabove, the control system unit 3 illustrated in FIG. 1 causes periodicexcitation force for causing vibration in each direction of the X, Y,and Z, by imparting sinusoidal wave-formed control voltage to the firstpiezoelectric element 81, the second piezoelectric element 82, and thethird piezoelectric element 83, respectively.

Therefore, the control system unit 3 includes an oscillator 34 forcausing sinusoidal voltage, and this sinusoidal voltage is output toeach piezoelectric element 81, 82, and 83 after being amplified by anamplifier 35. In addition, the above-described control system unit 3 hasa vibration control means 31 for making detailed adjustment of thecontrol voltage in each of the X, Y, and Z directions. Note that, bysetting the frequency of the vibrations caused by the oscillator 34 asthe frequency resonating with the vibration system of either of the X,Y, or Z directions, an effort is made so that electric power is saved byamplifying the vibration. At this time, in order to avoid interferingvibrations of the vibration system in all directions, the naturalfrequency in each direction may be separated. In that case, the naturalfrequency in each direction will be separated by approximately −10% to+10%, for example.

Note that, in the present embodiment, as described above, the effectivelengths of the first plate-like spring members 71 and 71 and the secondplate-like spring members 72 and 72 can be changed by the spring seats71 c to 71 c and 72 c to 72 c, respectively. Therefore, with referenceto the natural frequency in the Z direction, the natural frequencies inthe X direction and the Y direction can be changed and adjusted so as tobe an appropriate value respectively.

The vibration control means 31 is composed mainly of an amplitudeadjustment circuit 31 a for adjusting the amplitude of the controlvoltage in each of the X, Y, and Z directions, and a phase adjustmentcircuit 31 b for adjusting each phase difference. In the presentembodiment, it is configured such that the amplitude adjustment circuit31 a corresponding to each of the control voltage in the X, Y, and Z ispresent, and the phase adjustment circuit 31 b that adjusts the phase ofthe control voltage with reference to the phase of the control voltagein the Z direction so as to result in a predetermined phase differencefrom the phase of the control voltage in the Z direction is provided forthe control voltage of the X and Y, respectively.

Then, the control system unit 3 has a conveyance path determinationmeans 33 for determining a conveyance path and a conveyance speedaccording to the article 9 to be conveyed, and a vibration switchingmeans 32 that issues an order for changing specific control values toeach amplitude adjustment circuit 31 a and each phase adjustment circuit31 b in accordance with the determined conveyance path and conveyancespeed.

Then, the conveyance path determination means 33 stores internally aplurality of data items of the conveyance path and the conveyance speedaccording to the article 9 to be conveyed, selects the conveyance pathand the conveyance speed from that data by an instruction from outside,which is not illustrated, and then, gives an order to the vibrationswitching means 32 so as to switch the vibration mode in conformity withthe conveyance path and conveyance speed which are selected then.

In addition, the vibration switching means 32 determines respectivespecific control values of each amplitude adjustment circuit 31 a andeach phase adjustment circuit 31 b such that the conveyance path and theconveyance speed become the ordered target values, and outputs an orderso as to switch to the control values.

The article conveyance device 1 that is configured as described aboveoperates specifically as follows, and performs the conveyance andsorting of the article 9 loaded on the movable bench 6.

Here, by simplifying the vibration device as illustrated in theschematic diagram of FIG. 10, a case in which the movable bench 6 iselastically supported with respect to the base 4 in each of the X, Y,and Z directions by elastic bodies 74, 75 and 76, and excitation means84, 85, and 86 are provided in each direction is supposed. As a resultof such a configuration, it is possible to operate the movable bench 6in the three directions by the excitation means 84, 85 and 86 providedin the three, that is, the X, Y, and Z directions. The elastic bodies 74to 76 in the schematic diagram of FIG. 10 correspond to the first tothird plate-like spring members 71 to 73 (see FIG. 4), and theexcitation means 84 to 86 correspond to the first to third piezoelectricelements 81 to 83 (see FIG. 4) as the first and second horizontalexcitation means and the vertical excitation means, respectively.

A periodic vibration displacement expressed by Z=Z₀×sinωt is applied inthe Z direction relative to the movable bench 6 of the model illustratedin FIG. 10. Here, Z₀ indicates the amplitude of the Z direction, ωindicates the angular frequency, and t indicates the time. In addition,also in each of the X and Y directions, vibrations having the samefrequency as in the Z direction are applied as indicated by the formulasX=X₀×sin(ωt+φx), Y=Y₀×sin(ωt+φy). Here, X₀ and Y₀ indicate the amplitudein the X direction and the Y direction, respectively, and φx and φyindicate the phase difference of the vibrations in the X direction andthe Y direction respectively with respect to the vibrations in the Zdirection.

In this way, by applying sinusoidal wave-like periodic vibrationdisplacement in each of the X, Y, and Z directions, three-dimensionalvibration into which these are combined together can be caused to themovable bench 6. For example, as illustrated in FIG. 10, when vibrationsare caused in the X and Y directions with providing the phasedifferences of φx and φy to the vibration component of the Z direction,vibrations having an elliptical trajectory with the right side on topare caused on the XZ plane in a two-dimensional manner, and vibrationshaving an elliptical trajectory with the right side at the bottom arecaused on the YZ plane. Then, furthermore by combining together the twovibrations, an elliptical trajectory on a three-dimensional space iscaused as illustrated at the bottom right of the figure.

Also, by changing the amplitude and phase of the vibration displacementin each direction, the size and direction of the two-dimensionalelliptical trajectory in the XZ plane and the YZ plane can be changed,and in correspondence, the size and direction of the ellipticaltrajectory on the three-dimensional space can be changed freely. It mustbe noted that in order to thus impart the periodic vibrationdisplacement in each direction, it is controlled that a periodicexcitation force is imparted in each direction.

As described above, when the movable bench 6 vibrates while tracing anelliptical trajectory, the article 9 loaded on top of the movable bench6 starts moving. Also, in this movement, the movement speed component inthe X direction can be controlled by the elliptical trajectory in the XZplane, and the movement speed component in the Y direction can becontrolled by the elliptical trajectory in the YZ plane. That is, bychanging the amplitude and the phase difference of the vibrations ineach of the X direction and the Y direction with reference to thevibration component in the Z direction, the movement speed component inthe X and Y directions can be changed and conveyance can be performed inany direction.

Specifically, the change of the movement speed is performed as follows.

According to the knowledge of the inventors, if explanation is providedby using FIG. 11 while referring to FIG. 10, the movement speed Vx (Vy)of the article 9 changes to trace the curve that is similar to thesinusoidal wave by the phase difference φx (φy). Therefore, when a phasedifference of a vibration component in the X direction with respect to avibration component in the Z direction is set to φ12 in FIG. 10, thearticle 9 will be conveyed in a direction in which the X becomespositive. Also, when the phase difference is set to φ14, the article 9will be conveyed in a direction in which the X becomes negative. Incontrast to these cases, when the phase difference is set to φ11 or φ13,the movement speed Vx becomes 0, and the article 9 will become a statein which the article stops moving in the X direction. In addition, bychanging the phase difference between φ11 and φ13, between φ13 and π, orbetween −π and φ11, speeds with respect to the positive direction andthe negative direction can be increased and decreased, respectively.Such relationships hold not only in the X direction, but also in the Ydirection, and similarly, by setting a phase difference with respect toa vibration component in the Z direction, the movement direction and themovement speed can be changed.

In this way, by changing the amplitudes X₀ and Y₀ of vibrationcomponents in respective X and Y directions, and the phase differencesφx and φy with respect to the Z direction vibration component, themovement speeds Vx and Vy in the X and Y directions can be changed.

In addition, according to the knowledge of the inventors, if explanationis provided with referring to FIG. 10, the curve indicating therelationship between the phase difference and the movement speed Vx (Vy)of the article 9 illustrated in FIG. 11 changes depending on thecoefficient of friction of the article 9 and the movable bench 6, andthen becomes a relationship illustrated in FIG. 12. That is, ifcoefficients of friction between two types of articles W11 and W12 andthe movable bench 6 are set as μ11 and μ12, respectively, and if thereis a relationship of μ11 <μ12, a graph of the movement speed at W12becomes a form with a curve of the movement speed at W11 shifted in adirection in which the phase difference becomes positive. Therefore,when articles 9 having different coefficients of friction aresimultaneously kept on the movable bench 6 for which ellipticalvibration is to be performed, the movement speed and the movementdirection are differed.

Specifically, when setting to the phase difference φ11 illustrated inFIG. 12, w11 does not move, and w12 will move in the negative direction.Also, when setting the phase difference between φ11 and φ12, it ispossible to move w11 in the positive direction, and to move w12 in thenegative direction. Then, when setting the phase difference as φ12, itis possible not to move W12, and to move only W11 in the positivedirection. Also, when setting between φ12 and φ14, it is possible tomove both w11 and w12 in the positive direction, but to replace themagnitude (large/small) of speeds of w11 and w12 at φ13 as a border. Inaddition, when minutely changing the phase difference at a range fromφ12 to φ14, speed ratio of w11 and w12 can be also changed.

Then, when setting the phase difference as φ14, it is possible not tomove W11, and to move only w12 in the positive direction. In addition,when setting the phase difference between φ14 and φ15, it is possible tomove w12 in the positive direction, and to move w11 in the negativedirection. When setting the phase difference as φ15, it is possible notto move w12 and to move only w11 in the negative direction. Then, whensetting the phase difference in a range from φ15 to π, it is possible tomove both w11 and w12 in the negative direction, and by changing thephase difference within this range, a ratio of the both movement speedscan also be changed.

In addition, according to the knowledge of the inventors, if explanationis provided by using FIG. 13 while referring to FIG. 10, therelationship between the phase difference φx (φy) and the movement speedVx (Vy) of the article 9 changes also by changing the amplitude X₀ (Y₀).That is, the curve that is similar to a sinusoidal wave, which is themovement speed Vx (Vy) of the article 9 with respect to the phasedifference φx (φy), generally changes in proportion to the amplitude X₀(Y₀) of the vibration displacement. Therefore, when the movement speedVx (Vy) of the article 9 is to be doubled, generally, the amplitude ofthe vibration displacement in the X (Y) direction may be doubled. Forachieving this, the amplitude of the control voltage may be changed inorder to impart a corresponding excitation force.

By doing in this way, in a case where two types of articles 9 havingdifferent coefficients of friction are conveyed in the X (Y) direction,by changing the phase difference φx (φy) of vibration in the X (Y)direction with respect to the vibration in the Z direction, it ispossible to move only either of the two types of articles 9, and tochange the speed ratio while changing the movement direction, andfurthermore, by changing the amplitude of vibration in the X (Y)direction, an absolute value of the movement speed can be controlled. Bycombining these, it is also possible to change the other speed whilemaintaining one speed, and to change the direction of conveyance.

By expanding the control of conveyance speed and direction in onedirection as described above in two directions, it is possible to movethe articles freely within the XY plane. That is, by setting thevibration in the horizontal direction to two directions of the X and Y,and combining with the vibration in the Z direction, respectively,elliptical vibration within the XZ plane and elliptical vibration withinthe YZ plane are produced respectively, and by generatingthree-dimensional elliptical vibration into which these vibrations arecombined together, and three-dimensionally switching the direction andsize of this elliptical vibration, the movement direction and themovement speed of the articles 9 can be controlled in more detail. Then,when elliptical vibration component within the XZ plane and ellipticalvibration component within the YZ plane are changed respectively, bychanging the amplitude and phase of the periodic excitation force whichoccurs by the control voltage in the X direction and the Y direction,respectively, with reference to periodic excitation force that occurs bythe control voltage in the Z direction, it is possible to impart themovement speed components of the X direction and the Y directionrespectively to the articles 9 in accordance with the relationships ofthe above-described FIGS. 11 to 13.

Therefore, the conveyance of the article 9 can be performed specificallyas follows. Hereinafter, while referring to FIG. 1, the explanation isprovided in accordance with the plan view in which conveyance modes ofeach article of FIGS. 14(a) to 14(f) are exemplified.

First, if the article 9 is only one type, as illustrated in FIG. 14(a),the article 9 can be moved in the X direction from a point of time ofbeginning (To), and moved by also adding the movement speed component inthe Y direction from one point of time (T₁) to change the direction. Insuch cases, there are a case where a conveyance destination is changedin accordance with the type of the article 9, and a case that thearticle 9 is determined as a defective item on the basis of inspectiondata by a camera provided separately to be conveyed outside of the line.In order to perform the conveyance in such a mode, the conveyance pathdetermination means 33 in FIG. 1 receives the type of the article 9 tobe conveyed as data related to articles to be conveyed from outside, andselects the conveyance path and the conveyance speed according to thearticle 9 on the basis of internally pre-stored data, or determines theconveyance direction and the conveyance speed on the basis of inspectiondata as the data related to articles to be conveyed to output the sameto the vibration switching means 32. In the vibration switching means32, it is determined whether or not it is necessary to switch thevibration mode in each direction in response to the conveyance directionand conveyance speed, and if the switching is necessary, specificcontrol values are ordered to each amplitude adjustment circuit 31 a andphase adjustment circuit 31 b for adjusting the amplitude and phase ofthe periodic excitation force in each direction.

Then, such determination of conveyance path change are made as needed,and when the amplitude and phase are adjusted by the vibration switchingmeans 32, it is possible to make the article 9 to move while tracingflexible trajectory in the X and Y directions as illustrated in FIG.14(b). The determination of conveyance path change may be made inaccordance with preset timings, or in response to signals from outside.

Also, as illustrated in FIG. 14(c), if the articles 9 a and 9 b are twotypes having different coefficients of friction, at beginning stage (T₀)the articles can be conveyed in one direction at the same speed, andfrom one point of time (T₁) the articles can be branched in differentdirections to move. In this case, at the beginning stage (T₀), vibrationis caused in the X direction with the phase difference φ13 in FIG. 12,vibration is not caused in the Y direction, and from the point of timeT₁, vibration is caused also in the Y direction and the vibration phasedifference from the Z direction is switched between φ11 and φ12 orbetween φ14 and φ15. Simultaneously also the speed in the X direction isswitched so as to provide a speed difference in the X direction betweenthe articles 9 a and 9 b by shifting the phase difference of vibrationwith respect to the Z direction from φ13. In this vibration switching,the conveyance path determination means 33 in FIG. 1 determinesappropriate conveyance path and conveyance speed in response to the settiming, or on the basis of data related to articles to be conveyed thatis input from outside, and issues a change order of the conveyancedirection and conveyance speed to the vibration switching means 32 onthe basis of that determination. Then, in the vibration switching means32, concrete control values of the amplitude and phase in each directioncorresponding to the ordered conveyance direction and conveyance speedare determined, and an order is issued to each amplitude adjustmentcircuit 31 a and phase adjustment circuit 31 b so as to change to thecontrol value.

Also, by performing similar control, as illustrated in FIG. 14(d), onlyone of the articles 9 a and 9 b can be moved, and also the speeddifference can be provided for both articles. In addition, asillustrated in FIG. 14(e), after selecting an arbitrary direction, thearticles can also be moved in directions opposite to each other alongthat direction.

In addition, by continuously performing such changes of the conveyancepath and speed, as illustrated in FIG. 14(f), each of the conveyancepaths and the conveyance speeds of the articles 9 a and 9 b can besimultaneously controlled within the XY plane independently.

Also, as described above, by performing control to convey articles 9having different coefficients of friction in different conveyancedirections, the conveyance directions can be differed even for articlesthat can be conceived as having apparently different coefficients offriction, such as different surface profile even when the coefficientsof friction are strictly the same. For example, such a case that evenfor the front face and the back face of the same member, concavities andconvexities of the faces are different and contact areas with themovable bench 6 are greatly different is applicable.

As described above, the vibration device 2 according to the presentembodiment comprises the base 4, the movable bench 6 elasticallysupported to the base 4, the first horizontal excitation means 81 thatvibrates the movable bench 6 in the X direction as the first horizontaldirection, the second horizontal excitation means 82 that vibrates themovable bench 6 in the Y direction as the second horizontal directionthat crosses the first horizontal direction, and the vertical excitationmeans 83 that vibrates the movable bench 6 in the Z direction as thevertical direction, the vibration device 2 comprises the first middlebenches 51 and 51 and the second middle bench 52 between the base 4 andthe movable bench 6, the vibration device 2 includes the firsthorizontal elastic support means, the second horizontal elastic supportmeans, and the vertical elastic support means that elastically connectthe base 4, the first middle bench 51, the second middle bench 52, andthe movable bench 6 sequentially in each direction of the X, Y, and Z,and the first horizontal elastic support means is configured from thefirst plate-like spring member 71 with the thickness directionapproximately matching to the first horizontal direction and with thelongitudinal direction arranged in the horizontal direction, the secondhorizontal elastic support means is configured from the secondplate-like spring member 72 with the thickness direction approximatelymatching to the second horizontal direction and with the longitudinaldirection arranged in the horizontal direction, and the vertical elasticsupport means is configured from the third plate-like spring member 73with the thickness direction approximately matching to the verticaldirection and with the longitudinal direction arranged in the horizontaldirection.

Because of being configured in this way, since the first to thirdplate-like spring members 71 to 73 as the elastic support means thatelastically support the movable bench 6 are provided in directions wherethese members easily elastically deform in each direction of the X, Y,and Z, and each of the plate-like spring members 71 to 73 has largerigidity in a direction that differs from the plate thickness direction,the movable bench 6 can be elastically supported in each directionrespectively and independently. Therefore, when vibrating in eachdirection by the first horizontal excitation means 81, the secondhorizontal excitation means 82, and the vertical excitation means 83,the vibrations can be controlled independently without having an impacton each other's direction. In addition, since these plate-like springmembers 71 to 73 are respectively arranged in a direction where thelongitudinal direction becomes horizontal, the height from the base 4 tothe movable bench 6 can be suppressed, and pitching and rolling of themovable bench 6 can be suppressed.

Also, because the first to third plate-like spring members 71 to 73 areconfigured to be provided in parallel in plural while being separated atthe predetermined distance, each of the plate-like spring members 71 to73 is connected so as to configure a part of parallel link, and istherefore easily displaced while retaining a state in which the intervalis constant with respect to each direction. Therefore, deformations intwisted mode are suppressed in each of the plate-like spring members 71to 73, and therefore, it is possible to perform the above-describedsupport in the three directions more stably.

Also, since it is configured such that respective excitation means arethe piezoelectric elements 81 to 83 stuck on at least one face of thefirst to third plate-like spring members 71 to 73, and the first tothird plate-like spring members 71 to 73 are vibrated by applying thesinusoidal voltage to the piezoelectric elements 81 to 83 to causeperiodic elongations, the configuration can be simplified and compactedby integrating respective plate-like spring members 71 to 73 as theelastic support means, and the excitation means 81 to 83.

Also, the spring seats 71 c to 72 c are provided respectively betweenthe first middle bench 51 and the first plate-like spring member 71, andbetween the second middle bench 52 and the second plate-like springmember 72, and positions of the spring seats 71 c to 72 c arerespectively configured to be changeable with respect to thelongitudinal directions of the first and second plate-like springmembers 71 and 72, and therefore the natural frequencies of theplate-like spring members 71 and 72 can be changed easily by changingthe positions of respective spring seats 71 c to 72 c with respect tothe longitudinal directions of the plate-like spring members 71 and 72.With this, it is possible to easily perform adjustments in which thenatural frequencies with respect to each direction are made to beseparated and closer.

In addition, the article conveyance device 1 according to the presentembodiment conveys the article 9 loaded on the movable bench 6 by thevibrations of the movable bench 6, and is configured to comprise theabove-described vibration device 2, the vibration control means 31 thatcontrols the respective excitation means 81 to 83 so as to generatesimultaneously the periodic excitation forces by the plurality ofexcitation means 81 to 83 which the vibration device 2 has, with thephase difference and at the same frequency, to cause three-dimensionalvibration trajectory to the movable bench 6, and the vibration switchingmeans 32 that switches the amplitude and phase difference of theperiodic excitation forces by the respective excitation means 81 to 83.

Because of being configured in this way, the article conveyance device 1having excellent controllability and being capable of conveying thearticle 9 on the movable bench 6 in arbitrary directions can beconfigured.

<Second Embodiment>

FIG. 15 illustrates a second embodiment, configured as an articlesorting device 101 that is one of the article moving devices, using thevibration device 2 of the present invention. For the same portion as thefirst embodiment, the same sign is applied, and the explanation isomitted.

In this embodiment, the configuration as the vibration device 2 is thesame as the case of the first embodiment, only a control system unit 103for controlling this device is different. Specifically, this embodimentdoes not have the vibration switching means 32 and conveyance pathdetermination means 33 which the control system unit 3 in the firstembodiment as illustrated in FIG. 1 has, and as illustrated in FIG. 15this embodiment has a phase difference input unit 132 as substitutes forthese means. The phase difference input unit 132 is configured to issuean order to each phase adjustment circuit 31 b corresponding to the Xand Y directions so as to set to the phase difference as a result ofbeing inputted respective phase differences in the X direction and the Ydirection with the phase of the control voltage in the Z direction as areference.

Here, an operation principle of the article sorting device 101 in thepresent embodiment is also similar to one that is explained using FIGS.10 to 13 in the above described first embodiment, and changes themovement speed and the movement direction of the article 9 by thecoefficients of friction of the movable bench 6 and the article 9, andthe phase difference and amplitude of the vibration in each direction.

Specifically, the sorting of the articles 9 is performed as follows.

According to the knowledge of the inventors, if explanation is providedby using FIG. 16 while referring to FIG. 10, as a result of the phasedifference φx (φy), the movement speed Vx (Vy) of the article 9 changesso as to trace a curve similar to a sinusoidal wave, and the movementspeed Vx (Vy) also changes depending on the coefficient of frictionbetween the article 9 and the movable bench 6. That is, if there is arelationship of μ21 <μ22<μ23in which coefficients of friction betweenthree types of articles W21, W22, and W23 and the movable bench 6 areset as μ21, μ22, and μ23, respectively, a graph of the movement speed atW22 becomes a form with a curve of the movement speed at W21 shifted ina direction in which the phase difference becomes positive, and a graphof the movement speed at W23 becomes a form with that curve furthershifted in the direction in which the phase difference becomes positive.Therefore, when articles 9 having different coefficients of friction aresimultaneously kept on the movable bench 6 for which ellipticalvibration is to be performed, the movement speed and the movementdirection are differed.

Specifically, when setting the phase difference to φ21 illustrated inFIG. 16, W21 goes in the positive direction, and W22 and W23 go to thesame negative direction, but the movement speed of W23 is higher thanthat of W22. Further, when setting the phase difference to φ22, W21 goesin the positive direction, W22 goes in the positive direction at lowerspeed than W21, and W23 goes in the negative direction. When setting thephase difference to φ23, W21 goes in the negative direction, W22 goes inthe positive direction, and W23 goes in the positive direction at higherspeed than W22. When setting the phase difference to φ24, W21 goes inthe negative direction, W22 goes in the negative direction at lowerspeed than W21, and W23 goes in the positive direction. Also other thansuch φ21 to φ24 the phase can be set arbitrarily, all of W21 to W23 canbe moved in the positive direction or the backward direction, and theorder of the magnitude of the movement speed can also be changed.

Also, as described above by using FIG. 13, the relationship between thephase difference φx (φy) and the movement speed Vx (Vy) of the article 9changes also by changing the amplitude X₀ (Y₀). That is, the curve thatis similar to a sinusoidal wave, which is the movement speed Vx (Vy) ofthe article 9 with respect to the phase difference φx (φy), generallychanges in proportion to the amplitude X0 (Y0) of the vibrationdisplacement. Therefore, when the movement speed Vx (Vy) of the article9 is to be doubled, generally, the amplitude of the vibrationdisplacement in the X (Y) direction may be doubled. For achieving this,the amplitude of the control voltage may be changed in order to impart acorresponding excitation force.

By performing such vibration control in one direction with respect tothe orthogonal X and Y directions simultaneously, the plurality of typesof articles 9 can be sorted on the movable bench 6 and moved indifferent directions.

Hereinafter, as illustrated in FIG. 17, the explanation is provided withsupposing that the three types of articles of W21, W22, and W23 areloaded on the movable bench 6. Note that, respective coefficients offriction are set as μ21, μ22, and μ23, and there shall be a relationshipof μ21<μ22<μ23 among these coefficients.

The movement speed of such articles on the movable bench 6 can bethought by decomposing the speed into the X directional movement speedcomponent Vx and the Y directional movement speed component Vy, and asdescribed above Vx and Vy can be controlled by the elliptical trajectorywithin the XZ plane and the elliptical trajectory within the YZ plane,respectively, and have the above-described relationship of FIG. 16, forthe relationship with the phase difference with respect to the vibrationcomponent in the Z direction, respectively.

Here, as directions for moving the articles W21, W22, and W23 havingdifferent coefficients of friction, as illustrated in FIG. 17 the regionis divided by up, down, left, and right and the divided regions are setas A, B, C and D regions, respectively. By changing the phasedifferences φx and φy, with respect to the vibration component in the Zdirection, of the vibration components of the X and Y, the movementdirection can be set to any of these regions.

For example, when setting φx and φy to φ21 and φ22, respectively,illustrated in FIG. 16, as indicated in the Table of FIG. 18(a), the Xdirectional movement speed components Vx of the W21, W22, and W23 becomevalues of the positive (+), the negative (−), and the negative (−),respectively, and the Y directional movement speed components Vy thereofbecome values of the positive (+), the positive (+), and the negative(−), respectively. That is, in the region illustrated in FIG. 17, theW21 will be about to move to the D region, the W22 will be about to moveto the C region, and the W23 will be about to move to the A region, andas a result, as illustrated in FIG. 20(a), the W21 to W23 move whilebeing sorted into respective regions.

Similar to this, as illustrated in the Table of FIG. 18(b), when φx=φ21and φy=φ24, the W21, W22, and W23 proceed to the B, A, and Cregions,respectively, and as a result, as illustrated in FIG. 20(b), the W21 toW23 move while being sorted into respective regions.

In addition, as illustrated in FIGS. 18(c) and 18(d) and FIGS. 19(e) to19(h), when φx=φ22 and φy=φ21, the 21, W22, and W23 move while beingsorted into the D, B, and A regions, respectively, when φx=φ22 andφy=φ23, the W21, W22, and W23 move while being sorted into the B, D, andC regions, respectively, when φx=φ23 and φy=φ22, the W21, W22, and W23move while being sorted into the C, D, and B regions, respectively, whenφx=φ23 and φy=φ24, the W21, W22, and W23 move while being sorted intothe A, B, and D regions, respectively, when φx=φ24 and φy=φ21, the W21,W22, and W23 move while being sorted into the C, A, and B regions,respectively, and when φx=φ24 and φy=φ23, the W21, W22, and W23 movewhile being sorted into the A, C, and D regions, respectively.

In this way, if the articles 9 have different coefficients of friction,the articles 9 can move to different directions, respectively, and eacharticle can be changed in an arbitrary movement direction.

By using the principle as described above, specifically, the sorting ofthe articles 9 is performed using the present article sorting device 101as follows. Hereinafter, the explanation is provided using FIG. 15 andFIG. 16.

First, respective phase differences φx and φy of the vibrationcomponents in the X direction and in the Y direction with respect to thevibration component in the Z direction are input from the phasedifference input unit 132. In accordance with the input values, thephase difference input unit 132 orders to each corresponding phaseadjustment circuits 31 b and 31 b so as to shift the phases ofvibrations in the X and Y directions by φx or φy. Then, the phaseadjustment circuit 31 b imparts the phase difference from the vibrationcomponent in the Z direction by shifting the phase by φx or φy from theinitial signals of the oscillator 34 to apply it as the control voltageto the first piezoelectric element 81 and the second piezoelectricelement 82. In this way, for example, when the setting of φx=φ23 andφx=φ22 are input from the phase difference input unit 132, the articles9 having the above-described properties of the W21, W22, and W23 can besorted into the C, D and B regions of FIG. 17, respectively, similar tothe case of FIG. 19(e).

Also, if the phase differences as illustrated in FIG. 18 and FIG. 19 areset from the phase difference input unit 132, the articles 9 can then besorted as described in the respective Tables.

Here, in the present invention, when setting to the phase difference forperforming the above-described sorting, the coefficient of friction atwhich the movement speed becomes 0 is defined as a reference coefficientof friction. That is, the reference coefficient of frictioncorresponding to the phase differences φ21 and φ23 in FIG. 16 is pa, andthe reference coefficient of friction corresponding to φ22 and φ24 inFIG. 16 is μb. That is, setting the phase difference to φ23 issynonymous with setting the reference coefficient of friction to pa asthe boundary where the sorting is performed while setting such that thearticle 9 having a larger coefficient of friction than this referencecoefficient is made to go in the positive direction, and the article 9having a smaller coefficient of friction than this reference coefficientis made to go in the negative direction. Similarly, setting the phasedifference to φ22 is synonymous with setting the reference coefficientof friction to μb as the boundary where the sorting is performed whilesetting such that the article 9 having a larger coefficient of frictionthan this reference coefficient is made to go in the negative direction,and the article 9 having a smaller coefficient of friction than thisreference coefficient is made to go in the positive direction.

Thus, the above-described phase difference input unit 132 can also beconfigured such that as being configured not to input the phasedifference itself as the reference for sorting in each direction of theX and Y, but as being configured to input the reference coefficient offriction with respect to in each direction of the X and Y, and either ofpositive and negative directions to which the article moves inaccordance with the magnitude (large/small) of the coefficient offriction to the reference coefficient of friction, the phase differencesare set automatically and output on the basis of the graph of FIG. 16stored internally from the information.

In addition, as it can be seen from FIG. 16, by changing the phasedifference of vibration with respect to the vibration in the Zdirection, the movement direction of the articles 9 having differentcoefficients of friction can be changed, and simultaneously, the speeddifference can be provided. Therefore, the present article sortingdevice 101 can sort the articles not only into the regions correspondingto the four corners on the movable bench 6, but can sort the articlesalso into more than four types, after making a more detailed regionsetting such as the middle of the regions.

Also, as described above, by performing control to sort the articles 9having different coefficients of friction, the sorting can be performedeven for articles that can be conceived as having apparently differentcoefficients of friction, such as different surface profile even whenthe coefficient of friction is strictly the same. For example, such acase that even for the front face and the back face of the same member,concavities and convexities of the faces are different and contact areaswith the movable bench 6 are greatly different is applicable.

As described above, the article sorting device 101 of the presentembodiment is for sorting the plurality of articles 9 loaded on themovable bench 6 by the vibrations of the movable bench 6, and comprisesthe above-described vibration device 2, and the vibration control means31 that controls the respective excitation means 81 to 83 so as tosimultaneously generate the periodic excitation forces by the pluralityof excitation means 81 to 83 which the vibration device 2 has, with thephase difference and at the same frequency, to cause thethree-dimensional vibration trajectory to the movable bench 6, and thedevice 101 is configured to simultaneously sort the plurality ofarticles 9 loaded on the movable bench 6, by setting a phase differencebetween the periodic excitation force by the first horizontal excitationmeans 81 and the periodic excitation force by the vertical excitationmeans 83, and a phase difference between the periodic excitation forceby the second horizontal excitation means 82 and the periodic excitationforce by the vertical excitation means 83, respectively, so as to moveeach article to a different direction on the basis of the magnitude withrespect to the reference coefficient of friction, of the coefficient offriction that each article 9 has, with the predetermined referencecoefficient of friction as the boundary.

Because of being configured in this way, the article sorting device 101having excellent controllability and being capable of sorting theplurality of articles 9 on the movable bench 6 in accordance with thecoefficients of friction can be configured.

<Third Embodiment>

FIG. 21 illustrates a vibration device 202, in a different form,alternative to the vibration device 2 which is common to theabove-described first embodiment and second embodiment. The same signsare applied to the same portions as the cases of the first embodimentand the second embodiment, and the explanation is omitted.

In this embodiment, the form from the base 4 to the sequentiallyconnected first plate-like spring member 71, the first middle bench 51,and the second spring member 72 are approximately the same as the formin FIG. 4.

As illustrated in FIG. 21, a second middle bench 252 connected with thesecond plate-like spring member 72 via the spring seat 72 c has arectangular parallelepiped block-like shape. Then, from the top face andunder face of the second middle bench 252, the third plate-like springmembers 73 to 73 are provided to extend toward both sides of the Xdirection, respectively, and are connected to spring-to-spring blocks273 e and 273 e formed as rectangular parallelepiped-like blocksdisposed outside of the first plate-like spring members 71 and 71,respectively.

With respect to the spring-to-spring blocks 273 e and 273 e,respectively, a pair of third plate-like spring members 73 to 73 whichare disposed so as to be separated in the Z direction and in parallel isconnected, and the blocks 273 e and 273 e are fixed so as to besandwiched between spring retainers 273 d to 273 d from the lowerdirection and the movable seats 261 and 261 from the upper direction.

In the present embodiment, the movable seats 261 and 261 are differentfrom the case of FIG. 3, and are in a form separated in the X direction,resulting in that the conveyance bench 63 can be directly fixed to themovable seats 261 and 261 without providing the movable plate 62 (seeFIG. 3). On the contrary to this, in a case where the movable seat 61 isnear the middle as the vibration device 2 described in FIG. 3, in orderto avoid providing screws near the middle of the conveyance bench 63, itis necessary to provide the movable plate 62 between the movable seat 61and the conveyance bench 63, and to have a configuration in which screwpositions are shifted. Accordingly, compared with such configurations,when having the configuration as the present embodiment, the weight ofthe movable portion can be reduced.

Also when being configured as described above, the effect similar to thecase of the vibration device 2 explained as the first embodiment and thesecond embodiment can be obtained. In addition, as an alternative to thevibration device 2 in the first embodiment, it is also possible to beconfigured as the article conveyance device by combining with thecontrol system unit 3 with using the vibration device 202 of the presentembodiment, and in that case the effect similar to the articleconveyance device explained in the first embodiment can be obtained.Also, as an alternative to the vibration device 2 in the secondembodiment, it is also possible to be configured as the articleconveyance device by combining with the control system unit 103 withusing the vibration device 202 of the present embodiment, and in thatcase the effect similar to the article sorting device explained in thesecond embodiment can be obtained.

<Fourth Embodiment>

In FIG. 22, a form in which a vibration device 302 according to a fourthembodiment of the present invention and in addition the control systemunit 3 for controlling this device 302 are configured as an articleconveyance device 301 that is one of the article moving devices, isillustrated.

The vibration device 302 illustrated in this figure is in a state wherea mounting bench and a peripheral wall part which are described laterare removed, and a state where a drive part 325 is exposed, and thedrive part 325 is elastically supported on a base 304, and piezoelectricelements 381, 382, and 383 as the excitation means are provided in thedrive part. In addition, the base 304 is elastically supported on afixed bench 321.

The control system unit 3 is configured such that the vibrations arecaused by performing a control of the voltage to be applied to thepiezoelectric elements 381, 382, and 383 to impart the periodicexcitation force to the vibration device 302 in each direction of the Xas the first horizontal direction, the Y as the second horizontaldirection, and the Z as the vertical direction.

Note that, similar to the above-described other embodiments, eachdirection of the X, Y, and Z is defined as illustrated in the coordinateaxis in the drawings, and also in the following, the explanation will beadvanced along the coordinate axis illustrated in the drawings asappropriate.

FIG. 23 is a perspective view illustrating the above-described vibrationdevice 302 as a state where the device is actually used, and FIG. 24illustrates this as a plan view. As illustrated in FIG. 23 and FIG. 24,in this state, four faces of the front face, the back face, and thelateral faces are covered with the above-described peripheral wall part342 installed along the outer peripheral edge of the base 304. Also, arectangular-shaped mounting bench 363 that configures one part of themovable bench 306 is provided at the top face, and as a mounting face, atop face 363 a of the mounting bench 363 is configured to be able toload the article 9 to be conveyed.

The peripheral wall part 342 has a function of covering and protectingthe four faces of the drive part 325 (see FIG. 22), and a function ofincreasing the weight of the base 304 and adjusting the barycentricposition, and is configured by combining lower part weights 342 a to 342b and top part weights 342 c to 342 d which are formed like a block.

The base 304 is elastically supported on the fixed bench 321 viavibration isolation springs 322 to 322 disposed at four corners of theunder face, and the fixed bench 321 is allowed to be installed at anyinstallation surface. At the fixed bench 321, since a pair of handles323 and 323 are provided with being separated in the X direction, thetransportation of the vibration device 302 can be easily performed bygrasping the handles 323 and 323.

Because of the configuration where the base 304 is elastically supportedvia the vibration isolation springs 322 to 322 as described above, evenif the vibrations are caused to the movable bench 306, propagation ofthe vibrations to the fixed bench 321 can be suppressed, andtransmission of the vibrations with respect to the installation surfacecan be prevented. Note that, in the vibration device 302 in the presentembodiment, although the fixed bench 321 is provided at the lower sideof the base 304 for easily performing the transportation andinstallation, it is also possible to install directly on theinstallation surface via the vibration isolation springs 322 to 322.That is, although the present embodiment has the configuration where thefixed bench 321 is provided in view of transportability, from the spiritof the present invention it cannot be said that the fixed bench 321 isan essential constituent element, and the fixed bench 321 can beidentified with the installation surface. As described later, thepresent invention has a characteristic that the overall device mass isregarded as one that a plurality of mass bodies are connected, and thereshows an association among the barycentric positions of these massbodies. In this context, the overall device mass designates a total massof portions on and over the base 304 elastically supported by thevibration isolation springs 322 to 322, and a mass of the fixed bench321 explained as being not essential in the present invention is nottaken into consideration.

A state where a part of members that configure the movable bench 306, apart of the lower part weights 342 a to 342 b and top part weights 342 cto 342 d, and the handles 323 and 323 are removed from the vibrationdevice 302 of FIG. 23, is illustrated in FIG. 25.

The vibration device 302 has a movable seat 361 therein, which iselastically supported with respect to the three axis directions of theX, Y, and Z, and the movable seat 361 is formed as a rectangularparallelepiped-like block. At the top part of the movable seat 361, theabove-described mounting bench 363 (see FIG. 23) is installed. Themovable seat 361 configures the movable bench 306 integrally with themounting bench 363, and is elastically supported with respect to thebase 304 inside the vibration device 302, and the vibrations can beimparted by an excitation means which is described after.

As illustrated in FIG. 24, the vibration isolation springs 322 to 322for elastically supporting the base 304 with respect to the fixed bench321 are disposed at four corners of the base 304. As illustrated in FIG.25, the vibration isolation springs 322 to 322 are provided so as toproject from the base 304, and the pointed end is configured to beconnected to the lower part weights 342 a and 342 a disposed so as toextend in the Y direction, and to elastically support the base 304 viathese weights.

For a specific connection configuration of the vibration isolationspring 322, the explanation is provided using FIG. 29. This figure is across-sectional arrow view taken along line B-B in FIG. 24.

As the vibration isolation spring 322, one in a general form can beused, and herein, one having a cylindrical elastic part at the middle,and comprising a disc-like plate at both sides with sandwiching theelastic part, and in which screw parts 322 a and 322 a are projected toboth sides from the plate, is used. The vibration isolation spring 322fixes the screw part 322 a by using a nut to a hole part 321 a formed inthe fixed bench 321, with one side end face abutted on the top face ofthe fixed bench 321. In addition, the opposite side end face isconfigured to screw the screw part 322 a until abutting the under faceof the lower part weight 342 a with the opposite side end face insertinginto a hole part 304 b formed in the base 304.

In this way, the vibration isolation spring 322 is allowed toelastically support the base 304 connected to the lower part weight 342a with respect to the fixed bench 321. As described above, when having aconfiguration where the fixed bench 321 is not used, it may beconfigured so as to dispose the vibration isolation spring 322 on theinstallation surface directly, using the vibration isolation spring 322not having the screw part 322 a at the lower end.

A state where the peripheral wall part 342 is further removed from thevibration device 302 in the state of FIG. 25 is illustrated in FIG. 26.Note that, intrinsically, the base 304 loses the support by removing theperipheral wall part 342 and cannot keep a separated state from thefixed bench 321, but in the present figure it is described in a usualposition relationship where the base 304 is elastically supported.

Hereinafter, by using this figure, the configuration of the vibrationdevice 302 according to the present embodiment is explained in detail.

This vibration device 302 is configured to elastically support themovable seat 361 in the three directions of the X, Y, and Z, withrespect to the base 304 elastically supported using the above-describedvibration isolation spring 322 on the fixed bench 321 that can beapproximately identified with the installation surface, and is providedwith the first plate-like spring members 371 and 371 as the firsthorizontal elastic support means, the second plate-like spring members372 and 372 as the second horizontal elastic support means, and thethird plate-like spring members 373 and 373 as the vertical elasticsupport means so as to sequentially connect the base 304, first middlebenches 351 and 351, a second middle bench 352, and the movable seat 361as the rigid body portion. The respective plate-like spring members 371to 373 are disposed such that the plate thickness direction becomes inthe X, Y, and Z directions, respectively, resulting in that the elasticdeformation can be easily performed with respect to the directions.

In addition, first piezoelectric elements 381 to 381 as the firsthorizontal excitation means for vibrating the movable seat 361 in thethree directions of the X, Y, and Z, second piezoelectric elements 382to 382 as the second horizontal excitation means, and thirdpiezoelectric elements 383 to 383 as the vertical excitation means areincluded.

Hereinafter, explanations for these configurations are provided in moredetail.

First, the fixed bench 321 and the base 304 are formed as therectangular-shaped plate, respectively, and as described above, the base304 is elastically supported on the fixed bench 321 by the vibrationisolation springs 322 to 322 provided at the four corners. The vibrationisolation springs 322 to 322, for which one that shows weak springcharacteristic having about one-tenth of the spring constant as comparedwith the above-described plate-like spring members 371 to 373 installedin each direction is used, is configured to suppress the propagation ofvibrations with respect to the installation surface from the base 304,and to reduce counterforce from the installation surface to stabilizethe attitude of the base 304. Also, with respect to the resonancefrequency in each direction of the X, Y, and Z in a mode where themovable bench 306 vibrates in the opposite phase with respect to thebase 304, the resonance frequency in the Z direction in a mode where theoverall device on the base 304 vibrates with respect to the fixed bench321 integrally is kept at or below one-tenth, and also when causing thevibrations to the movable bench 306, the base 304 can be stabilized.

Then, on the base 304, attachment blocks 341 are fixed so as to berectangularly disposed at four places in positions slightly closer tothe center than the vibration isolation springs 322 to 322. Theattachment blocks 341 are formed as blocks having an L-shaped crosssection respectively, and are in a state where one side that forms theletter L is abutted to the base 304, and the other side is raised. Then,the raised side is configured to form the YZ plane orthogonal to the Xdirection. Then, the first plate-like spring members 371 and 371 areprovided to connect to the attachment blocks 341 and 341 which areadjacent in pairs in the Y direction. Since the first plate-like springmembers 371 and 371 are attached in the YZ plane which theabove-described respective attachment blocks 341 to 341 have, the platethickness direction will be in the X direction and the longitudinaldirection will be in the Y direction.

Also, the first plate-like spring members 371 and 371 will be providedin parallel by two parts with the members 371 and 371 separated at apredetermined distance in the X direction, because the members 371 and371 are respectively provided at the two pairs of attachment blocks 341to 341.

Also, both end parts of the first plate-like spring members 371 and 371are supported such that the deflection angle is regulated, because theboth end parts are fixed by using a bolt so as to be sandwiched betweenrectangular-shaped spring retainers 371 d to 371 d and the YZ planewhich the above-described respective attachment blocks 341 to 341 have.

Then, near the center of the longitudinal direction of the firstplate-like spring members 371 and 371, the first middle benches 351 and351 are respectively connected via the spring seats 371 c. The firstmiddle benches 351 are formed in a rectangular parallelepiped shapeextending in the Y direction, respectively. In addition, springretainers 371 e and 371 e are provided so as to oppose to the respectivespring seats 371 c and 371 c, respectively. The first plate-like springmembers 371 and 371, in which the deflection angle is regulated so as tobe sandwiched by the opposing spring seats 371 c and 371 c and springretainers 371 e and 371 e respectively, are connected to theabove-described first middle benches 351 and 351 by being bolt-fastenedat these portions. Although the first middle benches 351 and 351 are intwo-divided configuration as illustrated in the plan view of FIG. 27,since the benches 351 and 351 are connected by the second plate-likespring members 372 and 372 which are described later, the benches 351and 351 operate integrally.

Returning to FIG. 26, the above-described first middle benches 351 and351 are formed in the rectangular parallelepiped shape as describedabove, and six faces are disposed so as to be in a direction orthogonalto each plane of the X, Y, and Z axes, respectively. Then, two secondplate-like spring members 372 and 372 are provided so as to connectbetween the XZ planes orthogonal to the Y axis which each has.

By attaching the members 372 and 372 in this way, the two secondplate-like spring members 372 and 372 are disposed in parallel whilebeing separated from each other at a predetermined distance in the Ydirection, and the plate thickness directions are respectivelyorthogonal to the Y axis, and the longitudinal direction is directed tothe X direction.

Because such that both end parts are sandwiched betweenrectangular-shaped spring retainers 372 d to 372 d and the XZ planewhich the above-described first middle benches 351 and 351 have, themembers 372 and 372 are fixed by bolt fasteners in that portion, thesecond plate-like spring members 372 and 372 are supported such that thedeflection angle is regulated.

Near the center, in the longitudinal direction, of the second plate-likespring members 372 and 372, the second middle bench 352 is connected viathe spring seats 372 c and 372 c. In addition, spring retainers 372 eand 372 e are provided so as to oppose to each of the spring seats 372 cand 372 c. The second plate-like spring members 372 and 372, in whichthe deflection angle is regulated so as to be sandwiched by the opposingspring seats 372 c and 372 c and spring retainers 372 e and 372 erespectively, are connected to the above-described second middle bench352 by being bolt-fastened at these portions.

The second middle bench 352 is configured as a rectangular frame body asillustrated in the plan view of FIG. 27, and is formed by combining fourrectangular parallelepiped blocks each having six faces which areorthogonal to each other in the X, Y, and Z directions.

As described above, the first plate-like spring members 371 and 371 andthe second plate-like spring members 372 and 372 can change the springconstant, and also change the natural frequency, by changing theeffective length by changing the size of the spring seats 371 c to 371 cand the spring retainers 371 e to 371 e, and by using one having thedifferent thickness and width.

Here, a cross-sectional arrow view taken along line A-A in FIG. 24 isillustrated in FIG. 28, and the explanation is continued supplementaryusing FIG. 28 in addition to FIG. 26.

A total of four third plate-like spring members 373 to 373 are providedby two respectively at the top face and under face of the second middlebench 352 configured as the rectangular frame body. The third plate-likespring members 373 to 373 are provided so as to connect in the Xdirection between respective XY planes formed as the top face and underface of the portion that exists at positions of two sides parallel tothe Y direction, of sides that configures the rectangle which forms thesecond middle bench 352. Both end parts of the third plate-like springmembers 373 and 373 are fixed by bolt-fasteners so as to be sandwichedbetween the rectangular-shaped spring retainers 373 c to 373 c and theXY plane which the above-described second middle bench 352 has, andtherefore, the both end parts of the third plate-like spring members aresupported such that the deflection angle is regulated at this portion.

Also, near the middle part of the third plate-like spring members 373and 373 connected at the top face of the second middle bench 352, andthe third plate-like spring members 373 and 373 connected at the underface of the second middle bench 352, a spring-to-spring block 373 d isprovided in order to maintain the interval between both of the members.

In addition, below the spring-to-spring block 373 d, a spring retainer373 e is provided with sandwiching the third plate-like spring members373 and 373 that are connected at the under face of the second middlebench 352. The spring retainer 373 e can perform the fixing using thescrews, which are not illustrated, with the two third plate-like springmembers 373 and 373 sandwiched between the under face of the secondmiddle bench 352 and the spring retainer 373 e.

Also, above the spring-to-spring block 373 d, the above-describedmovable seat 361 is provided with sandwiching the third plate-likespring members 373 and 373 that are connected at the top face of thesecond middle bench 352. The movable seat 361 can perform the fixingusing screws, with two third plate-like spring members 373 and 373sandwiched between the top face of the second middle bench 352 and themovable seat 361. At the top face of the movable seat 361, the movableplate 362 formed like a rectangular plate is attached, at the top facethereof, the mounting bench 363 is screw-fastened together with a framemember 364. The top face of this mounting bench 363 will be the mountingface 363 a for loading the article. The mounting bench 363, frame member364, and movable plate 362 configure the above-described movable bench306 (see FIG. 24) together with the movable seat 361.

In addition, counter weights 373 f and 373 f, which are formed likeblocks so as to project to the left and right of the spring retainer 373e, are provided to balance with the movable bench 306, so that thebarycentric position of overall of the movable bench 306 side supportedby the third plate-like spring members 373 and 373 is almost the sameposition as the center between the third plate-like spring members 373and 373 in the horizontal direction and the vertical direction.Hereinafter, this barycentric position is referred to as “thebarycentric position in the movable bench 306.”

In this way, by positioning “the barycentric position in the movablebench 306” at the center in the horizontal direction and the verticaldirection between the third plate-like spring members 373 and 373, evenif the vibrations in the X direction and the Y direction are caused withrespect to the movable bench 306, the so-called swivel phenomenon, inwhich the movable bench 306 tilts by impact of inertial force, can besuppressed.

As described above, in the vibration device 302 of the presentembodiment illustrated in FIG. 26, it is configured that the firstmiddle benches 351 and 351 are elastically supported with respect to thebase 304 by the first plate-like spring members 371 and 371 in the Xdirection, the second middle bench 352 is elastically supported withrespect to the first middle benches 351 and 351 by the second plate-likespring members 372 to 372 in the Y direction, and the movable seat 361is elastically supported with respect to the second middle bench 352 bythe third plate-like spring members 373 to 373 in the Z direction. Byproviding such configurations, the movable bench 306 is configured to beelastically supported with respect to the base 304 in each direction ofthe X, Y, and Z.

Each of the plate-like spring members 371 to 373 has elasticity in theX, Y, and Z directions which are the plate thickness directionsrespectively, and has sufficient rigidity in the width direction andlongitudinal direction orthogonal to this direction. Therefore, thesupport in each direction can be considered as being independent.

Also, for each direction, by providing the first to third plate-likespring members 371 to 373 in parallel respectively, and by making themembers to support in pairs, it is configured as if the membersconfigured one part of the parallel link. By this, each of theplate-like spring members 371 to 373 is configured to be able to bedisplaced while keeping the relationship where the clearance is constantbetween the pairs, without performing the twist movement.

Also, in the vibration device 302 of the present embodiment, asillustrated in FIG. 23 and FIG. 24, by providing the peripheral wallpart 342 having a function as a barycentric adjustment member on thebase 304, the barycentric position of the base 304, the peripheral wallpart 342, and the members fixed to these is configured to be adjustable.Hereinafter, this barycentric position is referred to as “thebarycentric position in the base 304.” The base 304 can easily adjustthe barycentric position of the base 304 to a higher position byproviding the peripheral wall part 342, since the weight of the base 304is reduced by providing an opening part 304 a in the middle part asillustrated in FIG. 28. By doing so, the barycentric position of thebase 304 is set to a position that is almost the same as the barycentricposition in the above-described movable bench 306 in the horizontaldirection and the vertical direction.

The peripheral wall part 342 is configured to be able to minutely adjustthe barycentric position of the horizontal direction and the up-and-downdirection, since the part 342 have a configuration in which the lowerpart weights 342 a to 342 b configured from four blocks, and similarlythe top part weights 342 c to 342 d configured from four block areconnected up and down. Particularly, the top part weights 342 c to 342 dcan easily perform replacement because the weights 342 c to 342 d appearoutside, and can instantly cope with various condition changes such asdevice conditions and use conditions, such as balance adjustment withequipment to be additionally connected such as an inspection machine,and balance adjustment with the weight of an article to be conveyed.

Also, by providing weight as the peripheral wall part 342 with respectto the base 304, the base 304 is configured to have a mass about tentimes as large as a mass of the movable bench 306. In this way, even ifthe excitation force is imparted, in each direction of the X, Y, and Z,with respect to the movable bench 306, the vibration displacement whichoccurs to the base 304 by the counterforce can be reduced. Therefore,also at the operation, the position of the base 304 can be stabilized,and the movable bench 306 can be vibrated with higher accuracy.

Also, when the peripheral wall part 342 is seen from the viewpoint ofprotection of the drive part 325, at least the plate-like spring members371 to 373 as the elastic support means, and the piezoelectric elements381 to 383 which are provided at these members are preferably configuredto be covered from outside.

For “the barycentric position of the base 304” defined as describedabove, the rigid body portion positioned from the first plate-likespring members 371 to 371 to the second plate-like spring members 372 to372 are referred to as “a barycentric position in the first middle bench351”, and the rigid body portion positioned from the second plate-likespring members 372 to 372 to the third plate-like spring members 373 to373 are referred to as “a barycentric position in the second middlebench 352.” The first plate-like spring members 371 to 371 and thesecond plate-like spring members 372 to 372 are respectively provided atan attachment position which is almost the same as in the Z direction,and equally disposed with the above-described movable bench 306 as thecenter. For this reason, both of “ the barycentric position in the firstmiddle bench 351” and “the barycentric position in the second middlebench 352” are configured to be almost the same as the above-described“barycentric position in the movable bench 306” and “barycentricposition of the base 304, ” with respect to the horizontal direction andvertical direction. Note that, if the plate-like spring members 371 to373 are provided with dividing in the Z direction, it is sufficient thattheir center position is thought as the above-described attachmentposition.

In other words regarding the above-described relationship of thebarycentric position, if the mass of overall device elasticallysupported using the vibration isolation springs 322 to 322 is supposedas a first mass body, a second mass body, and a third mass bodysequentially connected from the base 304 side via the first plate-likespring members 371 to 371 and the second plate-like spring members 372to 372, these mass bodies have a relationship that respectivebarycentric positions are almost the same each other in the horizontaldirection and vertical direction.

Because of being configured in this way, when assuming as two massbodies of a mass body (the first mass body) of the base 304 sideelastically connected in the X direction via the first plate-like springmembers 371 to 371, and a mass body (the second mass body+the third massbody) of the first middle bench 351 side, the barycentric positions ofthe two mass bodies are almost the same with respect to both of thehorizontal direction and vertical direction. Therefore, if portions ofthe first middle bench 351 side integrally cause vibrations in the Xdirection, since the rotation moment does not occur between both massbodies, the attitude is stable without occurring tilt at the base 304side, and as a result, operation stabilization of the movable bench 306can be achieved.

Also, when the overall device is considered as two mass bodies of a massbody (the first mass body+the second mass body) of the first middlebench 351 side elastically connected in the Y direction via the secondplate-like spring members 371 to 371, and a mass body (the third massbody) of the second middle bench 352 side, the barycentric positions ofthe two mass bodies are almost the same with respect to both of thehorizontal direction and vertical direction. Therefore, also withrespect to the Y direction, the effect similar to the above is obtained.

The vibration device 302 of the present embodiment illustrated in FIG.26 has excitation means 381 to 383 independently in the X, Y, and Zdirections.

First, the first horizontal excitation means that is the excitationmeans in the X direction is configured from a total of eight firstpiezoelectric elements 381 to 381 which are stuck by two respectively inthe front and back near the both ends of two first plate-like springmembers 371 and 371. The first piezoelectric elements 381 to 381 causeelongation or contraction in the Y direction by being applied withvoltage, and can cause the displacement in the X direction by causingthe bending to the first plate-like spring members 371 and 371.

Since the first plate-like spring member 371 has a bend point in themiddle at which the bending direction changes, from a base-sideconnection point 371 a positioned by the spring retainer 371 d of theend part, to a first middle bench-side connection point 371 b positionedby the spring seat 371 c and the spring retainer 371 e of the middle,affixing the first piezoelectric elements 381 to 381 up to the portion,instead, will inhibit the deformation and reduce the efficiency.Therefore, it is efficient that the first piezoelectric elements 381 to381 are provided closer to any end parts, but avoiding the middle of theeffective length of spring.

The first piezoelectric elements 381 to 381 are provided at the sameposition from the end part respectively, and can cause the samedeformation by adjusting the output. Thereby, this allows to similarlydeform the first plate-like spring members 371 and 371 made to beseparated in the X direction while keeping the interval between themembers 371 and 371, and to displace the first middle benches 351 and351 only in the X direction while keeping the horizontal state.

Next, similar to the above-described first horizontal excitation means,the second horizontal excitation means that is the excitation means inthe Y direction is configured from a total of eight second piezoelectricelements 382 to 382 which are stuck by two respectively in the front andback near the both ends of the two second plate-like spring member 372and 372. The second piezoelectric elements 382 to 382 cause theelongation or contraction in the X direction by being applied withvoltage, and can cause the displacement in the Y direction by causingthe bending to the second plate-like spring members 372 and 372. Alsothe second piezoelectric elements 382 to 382 are attached at similarpositions to the first piezoelectric elements 381 to 381, thereby thisallows to similarly deform the second plate-like spring members 372 and372 made to be separated in the Y direction while keeping the intervalbetween the members 372 and 372, and to displace the second middle bench352 only in the Y direction while keeping the horizontal state.

In addition, the vertical excitation means that is the excitation meansin the Z direction is configured from a total of eight thirdpiezoelectric elements 383 to 383 which are stuck by two respectively inthe front and back near the both ends of two plate-like spring members373 and 373 of the upper side of the plate-like spring members 373 to373 provided up and down by two. The third piezoelectric elements 383 to383 cause the elongation or contraction in the X direction by beingapplied with voltage, and can cause the displacement in the Z directionby causing the bending to the third plate-like spring members 373 and373. Also the third piezoelectric elements 383 to 383 are attached atsimilar positions to the first piezoelectric elements 381 to 381 and thesecond piezoelectric elements 382 to 382, thereby this allows tosimilarly deform the third plate-like spring members 373 and 373 made tobe separated in the Z direction while keeping the interval between themembers 373 and 373, and to displace the movable seat 361 only in the Zdirection while keeping the horizontal state. Note that, the thirdpiezoelectric elements 383 to 383 can also be provided at two thirdplate-like spring members 373 and 373 which are provided at the lowerside, and can also be provided at a total of four third plate-likespring members 373 to 373 of the upper side and the lower side.

As described above, by changing the voltage that can impart thedisplacement in each direction of the X, Y, and Z in the form ofsinusoidal waves, periodic excitation force can be imparted, in eachdirection, with respect to the movable seat 361.

With respect to the vibration device 302 configured as described above,similar to the above-described first embodiment, as illustrated in FIG.22, the control system unit 3 is configured, and by respectivelyapplying the sinusoidal wave-like control voltage to the firstpiezoelectric element 381, the second piezoelectric element 382, and thethird piezoelectric element 383, the periodic excitation forces forgenerating the vibration in each direction of the X, Y, and Z arecaused.

The control system unit 3 is the same as explained in the firstembodiment, is configured to be able to control the vibration device 302similarly, and configures the article conveyance device 301 that is oneof the article moving devices in combination with the vibration device302.

Also in the article conveyance device 301 configured in this way,similar to the article conveyance device 1 in the first embodiment (seeFIG. 1), the conveyance and sorting of the articles 9 loaded on themovable bench 306 (see FIG. 23) can be performed.

Specifically, also the vibration device 302 of the present embodiment,similar to the case of the first embodiment, can be representedschematically as illustrated in FIG. 10, and can obtain thecharacteristics as illustrated in FIG. 11 to FIG. 13. Then, by utilizingsuch characteristics, as explained using FIGS. 14(a) to 14(f) as thefirst embodiment, the conveyance and sorting of the articles 9 on themovable bench 6 (306) can be performed.

As described above, by using the vibration device 302 in the presentembodiment, by configuring the article conveyance device 301 as thearticle moving device, the article 9 can be conveyed in any direction.In addition, for the vibration device 302 in the present embodiment, asdescribed above, since the barycentric position relationship of thefirst to third mass bodies is configured, the barycentric position ofportions elastically connected in the X direction via the firstplate-like spring members 371 to 371 is configured to be almost the samein the horizontal direction and vertical direction, and the barycentricposition of portions elastically connected in the Y direction via thesecond plate-like spring members 372 to 372 is configured to be almostthe same in the horizontal direction and vertical direction, and then inthe vibrations in the X direction and the Y direction, the generation ofthe rotation moment between the base 304 side and the movable bench 306side can be suppressed. Thereby, this allows the base 304 to beelastically supported on the fixed bench 321 by the vibration isolationsprings 322 to 322, but to keep the attitude stably without occurringthe tilt. Therefore, the vibration can be caused stably at the side ofthe movable bench 306 supported by the base 304, and the highly accurateconveyance of the article 9 can be performed. Also, by stabilizing theattitude of the base 304, unnecessary vibration does not transmit withrespect to the fixed bench 321 and installation surface, andtransmission of vibration and generation of noise can be suppressed tocontribute to improvement in the work environment.

In addition, since the first plate-like spring members 371 to 371 andthe second plate-like spring members 372 to 372 are provided so as to bealmost the same in the vertical direction with respect to thebarycentric position of the first to third mass bodies, the excitationforces in the X direction and the Y direction by the first piezoelectricelements 381 to 381 and the second piezoelectric elements 382 to 382 isconfigured to act in the barycentric direction. Therefore, bystabilizing the attitude of the above-described first to third massbodies, operation of the movable bench 306 can be more stabilized.

Also, in the vibration device 302 of the present embodiment, it isconfigured such that the counter weights 373 f and 373 f are provided atthe movable bench 306 which configures a part of the above-describedthird mass body, and the barycentric position of the movable bench 306is almost the same as the center between the third plate-like springmembers 373 to 373. Therefore, when the vibrations are caused in the Xand Y directions, the movable bench 306 is tilted from action ofinertial force, without occurring the so-called swivel, the movablebench 306 can be more stably vibrated, and operation with higheraccuracy can be performed.

In addition, by providing the peripheral wall part 342 at the base 304,the drive part 325 is protected, and displacement of the base 304 bycounterforce of excitation force can be reduced because of increase inmass of the base 304 side, resulting in that operation stability of themovable bench 306 can be further improved.

As described above, the vibration device 302 according to the presentembodiment is the vibration device 302 which comprises the base 304supported on the ground surface via the vibration isolation spring 322,the movable bench 306 elastically supported with respect to the base304, the first piezoelectric elements 381 to 381 that vibrates themovable bench 306 in the X direction, the second piezoelectric elements382 to 382 that vibrates the movable bench 306 in the Y direction, andthe third piezoelectric elements 383 to 383 that vibrates the movablebench 306 in the Z direction, and the vibration device 302 comprises thefirst middle benches 351 and 351 and the second middle bench 352 betweenthe base 304 and the movable bench 306, and includes the plurality offirst plate-like spring members 371 to 371, the plurality of secondplate-like spring members 372 to 372, and the plurality of thirdplate-like spring members 373 to 373 that elastically connect the base304, the first middle benches 351 and 351, the second middle bench 352,and the movable bench 306 sequentially in the X direction, the Ydirection, and the Z direction, and is configured such that if theoverall device is supposed as the first mass body, the second mass body,and the third mass body with the first plate-like spring members 371 to371 and the second plate-like spring members 372 to 372 as theboundaries, respective barycentric positions of these mass bodies arealmost the same in the vertical direction and horizontal direction.

Because of being configured in this way, by exciting vibration in threedirections of two horizontal directions of the XY and the verticaldirection (the Z direction), three-dimensional vibration can be causedto the movable bench 306, and even with a configuration in which thevibration isolation springs 322 to 322 are provided below the base 304,when the excitation force is caused in the horizontal direction,generation of the rotation moment can be suppressed and the attitude ofthe base 304 is stabilized, and vibration can be caused correctly to themovable bench 306. Also, without propagating the vibration with respectto the installation surface, transmission of vibration to thesurroundings and generation of noise can be suppressed and the workenvironment can be improved.

In addition, since the barycentric position of the each mass body andthe attachment position of respective plate-like spring members 371 to373 are configured so as to be almost the same in the verticaldirection, it is possible to cause the vibration with the attitude ofthe movable bench 306 further stabilized with respect to the twohorizontal directions.

Also, since it is configured such that the plurality of the thirdplate-like spring members 373 to 373 are provided so as to besymmetrical to each excitation direction with the barycentric positionof each mass body as the center, and the counter weights 373 f and 373 fto the movable bench 306 are provided at positions which are symmetricalwith sandwiching the third plate-like spring members 373 to 373,unexpected vibrations such as the swivel of the movable bench 306 at theoperation can also suppressed.

In addition, the peripheral wall part 342 raised from near the outerperipheral edge of the base 304 is provided, and since the peripheralwall part 342 is configured to surround the plate-like spring members371 to 373 and piezoelectric elements 381 to 383, and configured to beas the barycentric adjustment member that adjusts the barycentricposition of the base 304, the barycentric position of the base 304 canbe raised to easily match the barycentric position for each of theabove-described mass bodies, and the peripheral wall part 342 canfunction as a cover to protect the drive part 325.

In addition, the article conveyance device 301 as the article movingdevice according to the present embodiment is configured to comprise thevibration device 302 that is configured as described above, thevibration control means 31 that controls the each piezoelectric elements381 to 383 so as to cause three-dimensional elliptical vibrationtrajectory to the movable bench 306 by simultaneously generatingperiodic excitation forces by the piezoelectric elements 381 to 383 asthe plurality of excitation means which the vibration device 302 has,with the phase difference and at the same frequency, and the vibrationswitching means 32 that switches the amplitude and phase difference ofthe periodic excitation forces by each excitation means. Thereby, thisallows to effectively be configured as the article conveyance device 301having excellent controllability and being capable of conveying thearticle 9 on the movable bench 306 in any direction.

<Fifth Embodiment>

As illustrated in FIG. 30, a fifth embodiment is one which configures anarticle sorting device 401 that is one of the article moving devices,using the same vibration device 302 as one in the fourth embodiment. Thesame signs are applied to the same portions as the fourth embodiment,and the explanation is omitted.

In this embodiment, the configuration as the vibration device 302 issimilar to the case of the fourth embodiment, and only the controlsystem unit 103 for controlling this device is different. The controlsystem unit 103 uses the same unit illustrated in FIG. 15 as the secondembodiment.

Therefore, the same action as explained using FIG. 16 to FIG. 20 in thesecond embodiment can be caused, and similar to this, the sorting ofarticles 9 can be performed preferably.

As described above, in the present embodiment, since the same device asthe vibration device 302 explained in the fourth embodiment is used, thesame effect as the vibration device 302 explained in the above-describedfourth embodiment can be obtained.

In addition to that, the article sorting device 401 as the articlemoving device according to the present embodiment comprises theabove-described vibration device 302, and the vibration control means 31that controls the piezoelectric elements 381 to 383 so as to causethree-dimensional vibration trajectory to the movable bench 306 bysimultaneously generating the periodic excitation forces by thepiezoelectric elements 381 to 383 as the plurality of excitation meanswhich the vibration device 302 has, with the phase difference and at thesame frequency, and is configured to simultaneously sort the pluralityof articles 9 loaded on the movable bench 306, by setting a phasedifference between the periodic excitation force by the piezoelectricelements 381 and 382 as the horizontal excitation means and the periodicexcitation force by the piezoelectric element 383 as the verticalexcitation means, so as to move each article in a different direction onthe basis of the magnitude with respect to the reference coefficient offriction, of coefficient of friction that respective articles has,respectively, with a predetermined reference coefficient of friction asthe boundary.

By doing in this way, the article sorting device 401 having excellentcontrollability and being capable of sorting the plurality of articles 9on the movable bench 306 in accordance with the coefficients of frictioncan be effectively configured.

<Sixth Embodiment>

As illustrated in FIG. 31, a sixth embodiment is configured as avibration device 502 that is different from the device in the first tofifth embodiments. The same signs are applied to the same portions asthe cases of the first to fifth embodiments, and the explanation isomitted.

As described later, the vibration device 502 can cause arbitraryelliptical vibration trajectories within the XZ plane by impartingexcitation forces in the X direction and the Z direction with respect toa movable bench 506, and by adding the control system unit 3 (see FIG. 1and FIG. 22) similar to the first embodiment and the fourth embodiment,an article moving device 501 comprising the control system unit 3 can beconfigured as an article conveyance device that performs the conveyanceof articles with respect to the forward and backward directions of theX. In addition, by adding the control system unit 103 (see FIG. 15 andFIG. 30) similar to the second embodiment and the fifth embodiment, thearticle moving device 501 comprising the control system unit 103 can beconfigured also as an article sorting device that performs the sortingof articles with respect to the forward and backward directions of theX.

Although the detailed configuration explanation regarding the controlsystem unit which is used in the present embodiment is omitted, it issufficient to only have a configuration in which the phase adjustmentcircuit 31 b, amplitude adjustment circuit 31 a, and amplifier 35 forcontrolling excitation force in the Y direction are omitted from thecontrol system unit 3 in FIG. 1 or FIG. 22 or the control system unit103 in FIG. 15 or FIG. 30.

For the vibration device 502 in the present embodiment, as illustratedin FIG. 31 and FIG. 33, a base 504 is elastically supported via thevibration isolation springs 322 to 322 at the top part of a fixed bench521 formed like the rectangular plate. To the base 504, as describedlater, the movable bench 506 is elastically supported with respect tothe X direction and the Z direction, and a peripheral wall part 542 isprovided along outer peripheral edge of the base 504 so as to coverthese support parts. The peripheral wall part 542 is configured byconfiguring lower part weights 542 a to 542 b composed of four blocks asthe rectangular-shaped frame body, and by providing top part weights 542c and 542 c composed of two blocks at the top part thereof.

At the top part of the movable bench 506, a mounting bench 563 extendingin the X direction is provided, and the top face of the mounting bench563 is configured to be able to load the article 9 as a mounting face563 a. Then, so as to sandwich the mounting face 563 a in the widthdirection, step parts 563 b and 563 b are provided in the respectiveforward and backward directions of the Y, and therefore movement, in theY direction, of the article 9 loaded on the mounting face 563 a isregulated.

A state where the mounting bench 563 and a part of the peripheral wallpart 542 are removed from the state of FIG. 31 is illustrated in FIG.32.

A basic configuration of the elastic support means and excitation meansin which the movable bench 506 is as the center, is similar to thevibration device 302 in the fourth embodiment illustrated in FIG. 26,and can be a configuration that the second plate-like spring members 372and 372 and the second piezoelectric elements 382 to 382 regarding the Ydirection are removed from this configuration, and the third plate-likespring members 373 and 373 are supported directly with respect to thefirst middle benches 351 and 351.

If brief explanation is provided by using FIG. 32, first, with respectto the base 504, two middle benches 551 are elastically supported viatwo first plate-like spring members 571 and 571 configured to be able todisplace elastically in the X direction that is the horizontaldirection. In addition, with respect to a middle bench 551, a movableseat 561 is supported elastically via four third plate-like springmembers 573 to 573 configured to be able to displace elastically in theZ direction that is the vertical direction.

Here, a cross-sectional arrow view taken along line A-A in FIG. 33 isshown in FIG. 34. As it can be seen from this figure, the thirdplate-like spring members 573 to 573 are disposed up and down inparallel with sandwiching a spring-to-spring block 573 d, further, themovable seat 561 is provided at the top part thereof with sandwichingthe third plate-like spring member 573, and a spring seat 573 e isprovided at the lower part with sandwiching the third plate-like springmember 573.

The movable seat 561 configures the movable bench 506 integrally withthe mounting bench 563 by providing the mounting bench 563 at the toppart of the movable seat 561.

Also, at the spring seat 573 e, counter weights 573 f and 573 f areprovided to balance with the movable bench 506, and it is configured tohave a relationship that the barycentric position of overall movablebench 506 side that is elastically connected via the third plate-likespring members 573 to 573 is almost the same as the center positionbetween the third plate-like spring members 573 and 573 in thehorizontal direction and the vertical direction.

Also, with respect to this barycentric position, the center position ofthe third plate-like spring members 573 to 573 is also configured to bethe same in the vertical direction. In addition, all of the middlebenches 551 and 551, the first plate-like spring members 571 and 571,and the third plate-like spring members 573 to 573 are provided so as tobe symmetrical with respect to each direction of the X, Y, and Z withthe above-described barycentric position as the center. Therefore, thebarycentric position of overall mass of the middle benches 551 and 551side supported by the first plate-like spring member 571 and 571 isalmost the same position as the center between the third plate-likespring members 573 to 573 in the horizontal direction and verticaldirection.

In addition, by providing the peripheral wall part 542 with respect tothe base 504, the barycentric position of the base 504 side isconfigured to be adjustable. By doing this, the barycentric position ofthe base 504 side is also almost the same position as the center betweenthe third plate-like spring members 573 to 573 in the horizontaldirection and vertical direction.

In other words for the above-described point, if the overall device isconsidered by replacing with two mass bodies composed of a mass body ofthe base 504 side and a mass body of the middle bench 551 side with thefirst plate-like spring member 571 and 571 as the boundary, it can besaid to have a relationship in which the barycentric positions of thesemass bodies are almost the same position in the horizontal direction andvertical direction.

Also, in the vibration device 502, with respect to members positionedabove of the first plate-like spring members 571 and 571 and the thirdplate-like spring members 573 to 573, piezoelectric elements 581, 581,583, and 583 are provided respectively, and the excitation of vibrationin each direction can be performed by controlling the elements by thevoltage.

When configuring the article moving device 501 using the vibrationdevice 502 as the article conveyance device as described in the firstembodiment and the fourth embodiment, the article 9 which is put on themounting face 563 a as illustrated in FIG. 33 can be conveyed in anydirection of the forward direction or the backward direction of the X,further while changing speed. Also, when configuring the article movingdevice 501 as the article sorting device as described in the secondembodiment and the fifth embodiment, if the articles 9 are the articles9 a and 9 b having different coefficients of friction, both articles canbe sorted by moving one article in the forward direction of the X whilemoving the other in the backward direction.

In a case that such operation is performed, because of having therelationship of the barycentric position as described above, theattitude of the base 504 can be stabilized, and vibration of the movablebench 506 is accurately caused. Also, the counter weights 573 f and 573f are attached to the movable bench 506 and the barycentric position ismade appropriate, and thereby the swivel phenomenon of the movable bench506 can also be suppressed and the accuracy is further improved. Inaddition, the peripheral wall part 542 is provided with respect to thebase 504, and thereby the drive part 525 can be protected, and theweight of the base 504 can be increased, operation of the base 504 bycounterforce with respect to excitation force can be reduced, and theabove-described effect can further be heightened.

As described above, the vibration device 502 in the present embodimentcomprises the base 521 supported on the ground surface via the vibrationisolation springs 322 to 322, the movable bench 506 elasticallysupported with respect to the base 521, the first piezoelectric elements581 to 581 that vibrates the movable bench 506 in the horizontaldirection, and the third piezoelectric elements 583 to 583 that vibratesthe movable bench 506 in the vertical direction, and the vibrationdevice comprises the middle benches 551 and 551 between the base 521 andthe movable bench 506, and includes the plurality of first plate-likespring members 571 and 571 and the plurality of third plate-like springmembers 573 to 573 that elastically connect the base 521, the middlebench 551, and the movable bench 506 in the horizontal direction andvertical direction sequentially, and is configured such that if theoverall device is supposed as two mass bodies with the first plate-likespring members 571 and 571 as the boundary, respective barycentricpositions of the mass bodies are almost the same in the verticaldirection and horizontal direction.

Because of being configured in this way, elliptical vibration trajectorycan be caused to the movable bench 506 by exciting vibration in thehorizontal direction and vertical direction, and also when having aconfiguration in which the vibration isolation springs 322 to 322 areprovided under the base 504, it becomes possible to suppress generationof rotation moment when excitation force is caused in the horizontaldirection and to stabilize the attitude of the base 504, and tocorrectly cause vibrations to the movable bench 506. Also, withoutpropagating the vibration with respect to the installation surface,transmission of vibration to the surroundings and generation of noisecan be suppressed and the work environment can be improved.

<Seventh Embodiment>

A seventh embodiment is one that is configured as a vibration device 602that differs from the device in the first to sixth embodiments, asillustrated in FIG. 35. The same signs are applied to the same portionsas the cases of the first to six embodiments, and the explanation isomitted.

Similar to the case of the sixth embodiment, the vibration device 602can cause arbitrary elliptical vibration trajectory within the XZ planeby imparting excitation forces in the X direction and the Z directionwith respect to a movable bench 606, and as compared with the case ofthe vibration device 502 of the sixth embodiment (see FIG. 31), isconfigured so as to be larger in the height direction (the Z direction),and to be smaller in the machine width direction (the Y direction). Alsoin the vibration device 602, similar to the case of the sixthembodiment, by adding the control system unit 3 (see FIG. 1 and FIG. 22)similar to the first embodiment and the fourth embodiment, an articlemoving device 601 comprising the control system unit 3 can be configuredas the article conveyance device that performs the conveyance ofarticles with respect to the forward and backward directions of the X,and by adding the control system unit 103 (see FIG. 15 and FIG. 30)similar to the second embodiment and the fifth embodiment, the articlemoving device 601 comprising the control system unit 103 can beconfigured as the article sorting device that performs the sorting ofarticles with respect to the forward and backward directions of the X.

For the vibration device 602 in the present embodiment, as illustratedin FIG. 35 and FIG. 37, at the top part of a fixed bench 621 formed likea rectangular plate extending in the X direction, a base 604 iselastically supported via the vibration isolation springs 322 to 322.With respect to the base 604, as described later, the movable bench 606is elastically supported with respect to the X direction and the Zdirection, and a peripheral wall part 642 is provided along an outerperipheral edge of the base 604 so as to cover these support part. Theperipheral wall part 642 is configured as a rectangular-shaped framebody from weight members 642 a to 642 b composed of four blocks.

At the top part of the movable bench 606, a mounting bench 663 extendingin the X direction is provided, and the top face of the mounting bench663 is configured to be able to load the article 9 as a mounting face663 a. Then, so as to sandwich the mounting face 663 a step parts 663 band 663 b are provided in the forward and backward directions of the Y,respectively, so that movement, in the Y direction, of the article 9loaded on the mounting face 663 a is regulated.

A state where the mounting bench 663 and a part of the peripheral wallpart 642 are removed from the state of FIG. 35 is illustrated in FIG.36.

A basic configuration of elastic support means and excitation means withthe movable bench 606 as the center is approximately similar to thevibration device 502 in the sixth embodiment illustrated in FIG. 32, andis different from the attachment direction of the first plate-likespring members 571 and 571 for elastically supporting the movable bench506 side in the X direction with respect to the base 504, and from theconfiguration of the middle benches 551 and 551.

If brief explanation is provided by using FIG. 36, first, with respectto the base 604, a pair of first plate-like spring members 671 and 671is disposed in parallel while being separated in the X direction, andare attached so as to be raised in the Z direction. Then, at the topparts thereof, two blocks 651 a and 651 a that configure a part of amiddle bench 651 are connected. By doing this, the blocks 651 a and 651a are elastically supported with respect to the base 604 in the Xdirection.

In addition, across the blocks 651 a and 651 a, a pair of thirdplate-like spring members 671 and 671 disposed by facing each other upand down while directing the normal line direction in the Z direction isprovided, so that a movable seat 661 is elastically supported in the Zdirection by being supported by these members. Between each end part ofthe pair of third plate-like spring members 671 and 671, blocks 651 band 651 b are provided, so that parallelism between the third plate-likespring members 671 and 671 can be kept. Also, in order to be able toretain these positional relationships, a pair of plates 651 c and 651 cis provided as reinforcement members, and it is configured so as to besandwiched by these plates. The above-described blocks 651 a and 651 a,blocks 651 b and 651 b, and plates 651 c and 651 c are configured toconfigure one middle bench 651 as the rigid body, and to keep an almostconstant form.

Here, a cross-sectional arrow view taken along line A-A in FIG. 37 isillustrated in FIG. 38. As it can be seen from this figure, the thirdplate-like spring members 673 and 673 are disposed up and down inparallel with sandwiching a spring-to-spring block 673 d, andfurthermore the movable seat 661 is provided at the top part thereofwith sandwiching the third plate-like spring member 673, and a springseat 673 e is provided at the lower part thereof with sandwiching thethird plate-like spring member 673.

The movable seat 661 configures the movable bench 606 integrally withthe mounting bench 663 by providing the mounting bench 663 at the toppart of the movable seat 661.

Also, at the spring seat 673 e, a counter weight 673 f is provided tobalance with the movable bench 606, and it is configured to have arelationship that the barycentric position of the overall movable bench606 side that is elastically connected via the third plate-like springmembers 673 and 673 is almost the same as the center position betweenthe third plate-like spring members 673 and 673 in the horizontaldirection and vertical direction.

In addition, a relationship of the barycentric position between masseswith the first plate-like spring members 671 and 671 as the boundary,and a relationship of the barycentric position between masses with thethird plate-like spring members 673 and 673 as the boundary are alsoconfigured similarly to the sixth embodiment. It can be said that adifferent point from the sixth embodiment is only a point where thecenter between the third plate-like spring members 673 and 673 and thecenter between the first plate-like spring members 671 and 671 areconfigured by slightly shifting in the Z direction.

Also when being configured as described above, similar to the case ofthe sixth embodiment, with respect to the movable bench 606, vibrationscan be caused in the X and Z directions, and the articles can beconveyed and sorted by adding the control system unit to be configuredas the article moving device 601.

The vibration device 602 in this embodiment can stabilize the attitudeof the base 604 during the operation and cause vibrations of the movablebench 606 accurately, by having a barycentric position relationshipsimilar to the case of the sixth embodiment. Also, the counter weight673 f is attached with respect to movable bench 606 and the barycentricposition is made appropriate, thereby, the swivel phenomenon issuppressed, and operation accuracy is further improved. In addition, theperipheral wall part 642 is provided with respect to the base 604, sothat a drive part 625 can be protected, and the weight of the base 604can be increased to reduce operation of the base 604 by counterforcewith respect to excitation force, and the above-described effect can beenhanced.

Note that, the specific configurations of the respective components arenot limited only to the above-described first to seventh embodiments.

For example, in the first embodiment, the excitation means 81 to 83 ineach direction are configured to impart excitation force in respectivedirections of the X, Y, and Z orthogonal to each other, however, as longas vibration trajectory that is three-dimensionally combined togethercan be created/changed to the movable bench 6, it is not needednecessarily to be made orthogonal to each other, but merely respectivedirections may be made to cross. Also, it is not needed to set eachexcitation means 81 to 83 strictly in the vertical and horizontaldirections, and various utilization modes, such as tilting the base 4and installing the base 4 vertically, are also possible. Morespecifically, if the excitation means is obliquely provided, excitationforce including components in a plurality of directions of thehorizontal and vertical directions can also be caused by one excitationmeans. These points are similar also in the other second to seventhembodiments.

Also, in the first embodiment, although configured as a unimorph type inwhich the first to third piezoelectric elements 81 to 83 to be stuck onthe first to third plate-like spring members 71 to 73 are provided ateither face of back and front, it can also be configured as a bimorphtype in which the first to third piezoelectric elements are provided atboth faces so as to further increase excitation force. These points aresimilar also in the other second to seventh embodiments, and can beconfigured in any of the unimorph type and the bimorph type.

Also, in the first embodiment, as described in FIG. 4, the first tothird piezoelectric elements 81 to 83 are respectively stuck on outerhalf of the first to third plate-like spring members 71 to 73, but canbe configured to be stuck on inner half, and also, can be configured tobe provided on outer half and inner half, respectively. Also, respectivepiezoelectric elements 81 to 83 are stuck on outer half of theplate-like spring members 71 to 73, respectively, but can also beconfigured to be stuck on inner half by reversing this configuration,and can also be configured to be provided on outer half and inner half,respectively. Also these points can be said as being similar in theother second to seventh embodiments.

In addition, the first embodiment has the configuration that the firstto third plate-like spring members 71 to 73 are supported at end partsrespectively while supporting another member in the middle, but thefirst to third plate-like spring members 71 to 73 can be configured astwo plate-like spring members respectively by dividing near the middle.Also such a point can be said as being similar in the other second toseventh embodiments.

Also, in the first embodiment, the first to third plate-like springmembers 71 to 73 for performing elastic support, and the piezoelectricelement as the first to third excitation means 81 to 83 that performexcitation in each direction are integrally configured, however, ifrequirement for reducing in size is low, an electromagnet can be used asthe excitation means to configure independently of the plate-like springmembers 71 to 73. This point is also similar in the other second toseventh embodiments, and these embodiments can have the configurationusing the electromagnet.

Also, in the above-described embodiment, with reference to the phase ofperiodic excitation force in the Z direction, the control circuit isconfigured to adjust the phase of periodic excitation force in the Xdirection and periodic excitation force in the Y direction, however, aslong as the phase difference between the periodic excitation force inthe Z direction and each periodic excitation force in the X directionand the Y direction can be set as a predetermined value, the controlcircuit may be configured to change the phase of periodic excitationforce of direction.

As the vibration isolation spring 322 illustrated in the fourthembodiment, as long as having a sufficiently lower spring constant withrespect to the plate-like spring members 371 to 373, a metal springconfiguration, or a configuration from an elastic body such as rubbercan favorably be used without any inconvenience. This point is similaralso in the other fifth to seventh embodiments.

Various other changes may be applied to other configurations withoutdeparting from the spirit and scope of the present invention.

INDUSTRIAL APPLICABILITY

According to the above detailed first invention, it is possible toprovide a vibration device capable of effectively elastically supportinga movable bench while having the simple configuration, and ofsuppressing the pitching and rolling of the movable bench because of lowheight up to the conveyance surface, and an article conveyance deviceand an article sorting device having excellent controllability and usingthe vibration device. Also, according to the second invention, it ispossible to provide a vibration device capable of stabilizing theattitude of a base even with the mode in which the base is supported viaa vibration isolation spring because the rotation moment that occurs, atthe time when the excitation force is allowed to act on a movable bench,can be suppressed, of improving operation accuracy by furtherstabilizing the vibration of the movable bench to be supported by thebase, and of preventing noise and vibration etc., by suppressing thepropagation of vibration to the installation surface to improve the workenvironment, and an article conveyance device and an article sortingdevice having excellent controllability and using the vibration device.

REFERENCE SIGNS LIST

1 . . . article conveyance device (article moving device)

2 . . . vibration device

3 . . . control system unit

4 . . . base

6 . . . movable bench

9, 9 a, 9 b . . . article

31 . . . vibration control means

32 . . . vibration switching means

33 . . . conveyance path determination means

34 . . . oscillator

35 . . . control voltage amplifier

42 . . . cover

51 . . . first middle bench

52 . . . second middle bench

61 . . . movable seat

62 . . . movable plate

63 . . . conveyance bench

71 . . . first plate-like spring member (first horizontal elasticsupport means)

72 . . . second plate-like spring member (second horizontal elasticsupport means)

71 . . . third plate-like spring member (vertical elastic support means)

81 . . . first piezoelectric element (first horizontal excitation means)

82 . . . second piezoelectric element (second horizontal excitationmeans)

83 . . . third piezoelectric element (vertical excitation means)

101 . . . article sorting device (article moving device)

132 . . . phase difference input unit

322 . . . vibration isolation spring

373 f . . . counter weight

The invention claimed is:
 1. A vibration device comprising a base, amovable bench elastically supported with respect to the base, a firsthorizontal excitation unit that vibrates the movable bench in a firsthorizontal direction, a second horizontal excitation unit that vibratesthe movable bench in a second horizontal direction that crosses thefirst horizontal direction, and a vertical excitation unit that vibratesthe movable bench in a vertical direction, the vibration devicecomprising: a first middle bench and a second middle bench between thebase and the movable bench, and the vibration device including: a firsthorizontal elastic support unit configured to vibrate in the firsthorizontal direction; a second horizontal elastic support unitconfigured to vibrate in the second horizontal direction; and a verticalelastic support unit that elastically connect the base, the first middlebench, the second middle bench, and the movable bench sequentially inthe first horizontal direction, the second horizontal direction, and thevertical direction, wherein the first horizontal elastic support unit isconfigured from a first plate-like spring member with a thicknessdirection approximately matching to the first horizontal direction andwith a longitudinal direction arranged in a horizontal direction, thesecond horizontal elastic support unit is configured from a secondplate-like spring member with a thickness direction approximatelymatching to the second horizontal direction and with a longitudinaldirection arranged in a horizontal direction, the vertical elasticsupport unit is configured from a third plate-like spring member with athickness direction approximately matching to the vertical direction andwith a longitudinal direction arranged in a horizontal direction, thefirst horizontal direction is X-direction and the second horizontaldirection is Y-direction, the first horizontal elastic support unitelastically supports the first middle bench respective to the base inthe first horizontal direction, the second horizontal elastic supportunit is connected to the first middle bench and elastically supports thesecond middle bench in the second horizontal direction, the verticalelastic support unit is connected to the second middle bench andelastically supports the movable bench in the vertical direction; andthe base, the first middle bench, the second middle bench, the firsthorizontal elastic support unit, the second horizontal elastic supportunit, and the vertical elastic support unit are located below saidmovable bench.
 2. The vibration device according to claim 1, wherein atleast any of the first to third plate-like spring members are providedin parallel in plural while being separated at a predetermined distance.3. The vibration device according to claim 1, wherein the first andsecond horizontal excitation units and the vertical excitation unit arepiezoelectric elements that are stuck on at least one face of the firstto third plate-like spring members, and the first to third plate-likespring members are vibrated by applying sinusoidal voltage to thesepiezoelectric elements to cause periodic elongation.
 4. The vibrationdevice according to claim 2, wherein the first and second horizontalexcitation units and the vertical excitation unit are piezoelectricelements that are stuck on at least one face of the first to thirdplate-like spring members, and the first to third plate-like springmembers are vibrated by applying sinusoidal voltage to thesepiezoelectric elements to cause periodic elongation.
 5. The vibrationdevice according to claim 1, wherein spring seats are provided betweenat least any of the base and the first middle bench and the firstplate-like spring member, and between at least any of the first middlebench and the second middle bench and the second plate-like springmember, respectively, and positions of the spring seats are configuredto be changeable with respect to the longitudinal directions of thefirst and the second plate-like spring members, respectively.
 6. Anarticle conveyance device that conveys the article loaded on a movablebench by vibration of the movable bench, the article conveyance devicecomprising: the vibration device according to claim 1, a vibrationcontrol unit that controls each excitation unit so as to simultaneouslygenerate periodic excitation force by a plurality of the excitationunits which the vibration device has, with a phase difference and at thesame frequency, to cause three-dimensional vibration trajectory to themovable bench, and a vibration switching unit that switches an amplitudeand the phase difference of the periodic excitation force by the eachexcitation unit.
 7. An article sorting device that sorts a plurality ofarticles loaded on a movable bench by vibration of the movable bench,the article sorting device comprising: the vibration device according toclaim 1, and a vibration control unit that controls each excitation unitso as to simultaneously generate periodic excitation force by aplurality of the excitation units which the vibration device has, with aphase difference and at the same frequency, to cause three-dimensionalvibration trajectory to the movable bench, wherein by setting a phasedifference between the periodic excitation force by the horizontalexcitation units and periodic excitation force by the verticalexcitation unit, so as to move each article to a different direction onthe basis of the magnitude, with respect to a reference coefficient offriction, of coefficient of friction which individual article has, withthe predetermined reference coefficient of friction as a boundary, theplurality of articles loaded on the movable bench are simultaneouslysorted.